Nor-Cal 797-209034-001 压力控制器 PDF资料
1.产 品 资 料 介 绍:
Nor-Cal 797-209034-001 压力控制器
该控制器是Nor-Cal Products旗下Intellisys™系列的自适应压力控制器,专为半导体制造等精密真空工艺设计,可实现精准、快速且可靠的下游压力闭环控制。
产品特点(10条)
采用自适应压力控制算法,可应对工艺中的突发压力扰动
支持模拟量、DeviceNet及Ethernet等多种通信协议
精度高达0.2% FS,满足精密工艺控制要求
可同时接入一到两个压力计信号,灵活性高
支持PID控制与限位控制等多种输出方式
内置全部控制电子元件与软件,为独立式单元
具备本地开/关切换开关及LED状态指示灯
支持RS232串行通信,便于远程监控与调试
适用于真空镀膜、刻蚀等多种半导体工艺场景
符合CE标准及EMC指令,通过相关安全认证
产品参数(5条)
型号:797-209034-001
产品系列:Intellisys™自适应压力控制器
精度:0.2% FS
额定输入电压:24 VDC ±5%
额定电流:最大2.5A @ 24VDC,平均0.5A @ 24VDC
综上,Nor-Cal 797-209034-001 精度高、通信灵活、响应可靠,是真空工艺压力控制的优选方案
Nor-Cal 797-209034-001 压力控制器 英文介绍
Nor-Cal 797-209034-001 Pressure Controller
This controller is an adaptive pressure controller from the Intellisys™ series of Nor-Cal Products, specifically designed for precise vacuum processes in semiconductor manufacturing. It enables precise, fast, and reliable downstream pressure closed-loop control.
Product features (10 points)
Adaptive pressure control algorithm is adopted, capable of handling sudden pressure disturbances in the process
Supports multiple communication protocols such as analog, DeviceNet, and Ethernet
Accuracy up to 0.2% FS, meeting the requirements of precise process control
Can simultaneously connect one to two pressure sensor signals, with high flexibility
Supports various output modes such as PID control and limit control
All control electronic components and software are built-in, making it an independent unit
Equipped with a local on/off switch and LED status indicator
Supports RS232 serial communication for convenient remote monitoring and debugging
Suitable for various semiconductor process scenarios such as vacuum coating and etching
Complies with CE standards and EMC directives, and has passed relevant safety certifications
Product parameters (5 points)
Model: 797-209034-001
Product series: Intellisys™ Adaptive Pressure Controller
Accuracy: 0.2% FS
Rated input voltage: 24 VDC ±5%
Rated current: Maximum 2.5A @ 24VDC, average 0.5A @ 24VDC
In summary, Nor-Cal 797-209034-001 has high accuracy, flexible communication, and reliable response, making it the preferred solution for vacuum process pressure control.

3.其他产品
BENTLY 149992-01 通道继电器卡
AB 1747-L541 处理器单元
B&R 7CP476-010.9 数字量输入模块
4.其他产品
IS220PRTDH1A 363A4940CSP6 Gas turbine electric
IS230SRTDH2A Gas turbine electric
IS230TBAIH2C gas turbine electric card
| PXIe-8384 | R84GENA-R2-NS-NV-00 | S24HMNA-HNNM-00 |
| PXIe-8234 | R43GENA-TS-M3-VS-02 | R22GMNA-NP-NS-NV-03 |
| PXIe-8135 | R45HCNA-R2-NS-NV-00 | S34HNNA-RNNM-00 |
| PXIe-8133 | SC104-001-T4 | S21HNNA-HGNS-02 |
| PXIe-8130 | R34JENT-TS-LB-NV-01 | R34KMNC-R2-NS-NV-00 |
| PXIe-8115 | R34KENP-R2-NS-NV-00 | R32GENC-HS-ND-VS-00 |
| PXIe-8108 | R46GEAH-R2-NS-NV-00 | S31HNNA-RNVM-00 |
| PXIe-8106 | SC104-001-T1 | S31GNNA-RNUM-00 |
本篇文章出自瑞昌明盛自动化设备有限公司官网,转载请附上此链接:https://www.jiangxidcs.com



