MKS 253B-31797 节流蝶阀 PDF资料
1.产 品 资 料 介 绍：
MKS 253B-31797 节流蝶阀是MKS Instruments为半导体真空工艺设计的电动排气节流阀，用于精准控制工艺腔体压力，适用于刻蚀、沉积等制程。
产品特点
采用非线性激励器设计，阀门开度与压力控制呈线性关系。
阀体材质为316L不锈钢，密封件为Viton氟橡胶，耐腐蚀性好。
外部泄漏率低至1×10⁻⁸ scc/sec，密封性能优异。
兼容MKS系列节流阀控制器，系统集成方便。
阀体工作温度0至90℃，电机环境温度0至70℃。
可选高速驱动配置，开关速度可达1.7秒以内。
最大允许跨阀压差为1个大气压。
驱动电机输出扭矩标准版为600英寸盎司。
关闭泄漏率低于10⁻⁷ Torr·L/s。
适配多种法兰规格，如NW40、NW50、CF等。
产品参数
阀体类型为蝶式排气节流阀，驱动方式为电动。
阀体材质为316L不锈钢，密封件为Viton氟橡胶。
阀体工作温度0至90℃，电机环境温度0至70℃。
外部泄漏率不超过1×10⁻⁸ scc/sec。
法兰规格有NW40、NW50、CF等多种可选。
结尾
MKS 253B-31797 节流蝶阀以优异的密封性能和线性压力控制能力，为半导体真空工艺提供可靠的压力管理解决方案。
MKS 253B-31797 节流蝶阀 英文介绍
The MKS 253B-31797 throttle butterfly valve is an electric exhaust throttle valve designed by MKS Instruments for semiconductor vacuum processes. It is used for precise control of process chamber pressure and is suitable for processes such as etching and deposition.
Product Features
Adopting a nonlinear exciter design, the valve opening is linearly related to pressure control.
The valve body material is 316L stainless steel, and the sealing element is Viton fluororubber, with good corrosion resistance.
The external leakage rate is as low as 1 × 10 ⁻⁸ sc/sec, and the sealing performance is excellent.
Compatible with MKS series throttle valve controllers, easy system integration.
The working temperature of the valve body is 0 to 90 ℃, and the ambient temperature of the motor is 0 to 70 ℃.
Optional high-speed drive configuration, with a switch speed of up to 1.7 seconds.
The maximum allowable cross valve pressure difference is 1 atmosphere.
The standard version of the drive motor output torque is 600 inches ounces.
Close the leakage rate below 10 ⁻⁷ Torr · L/s.
Compatible with various flange specifications, such as NW40, NW50, CF, etc.
Product Parameters
The valve body type is a butterfly exhaust throttle valve, and the driving method is electric.
The valve body material is 316L stainless steel, and the seal is Viton fluororubber.
The working temperature of the valve body is 0 to 90 ℃, and the ambient temperature of the motor is 0 to 70 ℃.
The external leakage rate shall not exceed 1 × 10 ⁻⁸ sc/sec.
There are various flange specifications available, such as NW40, NW50, CF, etc.
ending
The MKS 253B-31797 throttling butterfly valve provides a reliable pressure management solution for semiconductor vacuum processes with excellent sealing performance and linear pressure control capability.
MKS 253B-31797 节流蝶阀 产品图片
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