AMAT 0190-77528 伺服电机 PDF资料
1.产 品 资 料 介 绍:
AMAT 0190-77528 是应用材料半导体设备中使用的交流伺服电机,用于驱动晶圆搬运机械臂等精密运动部件。以下是核心参数与特点。
产品参数
电机类型:交流伺服电机
额定功率:400W
额定电压:200V AC
额定电流:2.6A
应用领域:半导体晶圆搬运与自动化系统
产品特点
专为应用材料半导体设备设计,适配晶圆传送机械臂等精密部件
采用交流伺服技术,具备高响应速度与高动态性能
配合驱动器实现精确的位置、速度与扭矩控制
适用于洁净室环境,满足半导体制造洁净度要求
体积紧凑,功率密度高,适合有限空间集成
具备过载与过热保护功能,保障设备安全运行
采用高分辨率编码器,实现精密定位与重复精度
运行平稳,低振动、低噪音
与 AMAT 设备控制系统无缝集成
广泛应用于 AMAT Reflexion CMP 等系列设备
综上所述,AMAT 0190-77528 伺服电机是应用材料半导体设备中精密运动控制的核心执行部件,为晶圆搬运与定位提供了可靠的动力支持。
AMAT 0190-77528 伺服电机 英文介绍
AMAT 0190-77528 is an AC servo motor used in semiconductor equipment for driving precision moving parts such as wafer handling robotic arms. The following are the core parameters and characteristics.
Product Parameters
Motor type: AC servo motor
Rated power: 400W
Rated voltage: 200V AC
Rated current: 2.6A
Application areas: Semiconductor wafer handling and automation systems
Product Features
Specially designed for semiconductor equipment applications, compatible with precision components such as wafer transfer robotic arms
Adopting AC servo technology, it has high response speed and high dynamic performance
Cooperate with the driver to achieve precise position, speed, and torque control
Suitable for cleanroom environments, meeting the cleanliness requirements of semiconductor manufacturing
Compact size, high power density, suitable for limited space integration
Equipped with overload and overheating protection functions to ensure the safe operation of equipment
Using high-resolution encoders to achieve precise positioning and repeatability accuracy
Smooth operation, low vibration, low noise
Seamless integration with AMAT equipment control system
Widely used in AMAT Reflexion CMP and other series of equipment
In summary, AMAT 0190-77528 servo motor is the core executing component for precision motion control in applied material semiconductor equipment, providing reliable power support for wafer handling and positioning.
AMAT 0190-77528 伺服电机 产品图片

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