VAT A-2352575 执行器 PDF资料
1.产 品 资 料 介 绍:
VAT A-2352575 执行器:真空阀门系统专用驱动组件
VAT A-2352575 是 VAT 公司为半导体及真空应用场景设计的一款执行器。它通常作为 VAT 主流真空阀门(如闸阀、摆阀)的配套驱动部件,将控制指令转化为阀门的机械动作,是保障真空腔室压力控制与工艺气体通断的关键执行单元。
VAT A-2352575 执行器 产品特点
适配 VAT 品牌真空阀门系列,作为原厂配套驱动组件,安装匹配度高。
支持精确的阀门开度控制,能实现从全闭到全开的无级调节。
响应迅速,动作重复定位精度高,满足严苛的工艺节拍要求。
采用耐真空材料与密封设计,适用于高真空和超高真空环境。
具备过载保护功能,运行平稳,故障率低,可保障长期连续运行。
结构设计紧凑,便于在空间有限的设备气箱或腔体周边安装。
作为 VAT 产品线的一部分,提供长期的技术支持与备件服务。
工作状态稳定可靠,具备良好的抗电磁干扰能力。
多用于半导体刻蚀、沉积等设备的维护及停产备件替换。
具备完善的售后技术支持体系。
VAT A-2352575 执行器 产品参数
产品型号:VAT A-2352575。
品牌归属:VAT(瑞士 VAT 集团)。
产品类型:真空阀门执行器 / 驱动组件。
主要应用:适配 VAT 系列真空阀门(闸阀、摆阀)。
核心功能:阀门开闭与开度精确控制。
VAT A-2352575 执行器作为 VAT 真空阀门的专用驱动组件,在半导体真空工艺的精确控制中发挥着稳定作用,是设备维护与系统集成的可靠硬件选择。
VAT A-2352575 执行器 英文介绍
VAT A-2352575 actuator: specialized drive component for vacuum valve system
VAT A-2352575 is an actuator designed by VAT company for semiconductor and vacuum application scenarios. It is usually used as a supporting driving component for mainstream VAT vacuum valves (such as gate valves and swing valves), converting control instructions into mechanical actions of the valve, and is a key execution unit to ensure vacuum chamber pressure control and process gas on/off.
Features of VAT A-2352575 actuator product
Suitable for VAT brand vacuum valve series, as an original factory matching drive component, with high installation compatibility.
Supporting precise valve opening control, it can achieve stepless adjustment from fully closed to fully open.
Rapid response, high precision in repeated action positioning, meeting the strict requirements of process rhythm.
Adopting vacuum resistant materials and sealed design, suitable for high vacuum and ultra-high vacuum environments.
Equipped with overload protection function, it runs smoothly with low failure rate, ensuring long-term continuous operation.
The structural design is compact, making it easy to install around equipment gas boxes or chambers with limited space.
As part of the VAT product line, we provide long-term technical support and spare parts services.
The working state is stable and reliable, with good resistance to electromagnetic interference.
Commonly used for maintenance and replacement of spare parts for semiconductor etching, deposition, and other equipment.
Having a comprehensive after-sales technical support system.
VAT A-2352575 actuator product parameters
Product model: VAT A-2352575.
Brand affiliation: VAT (Swiss VAT Group).
Product type: Vacuum valve actuator/driver component.
Main application: Suitable for VAT series vacuum valves (gate valves, swing valves).
Core function: precise control of valve opening and closing and opening degree.
The VAT A-2352575 actuator, as a specialized driving component for VAT vacuum valves, plays a stabilizing role in precise control of semiconductor vacuum processes and is a reliable hardware choice for equipment maintenance and system integration.
VAT A-2352575 执行器 产品图片

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