AMAT 0100-00516 腔室联锁板 PDF资料
1.产 品 资 料 介 绍：
产品参数
产品型号：AMAT 0100-00516
产品类型：腔室联锁板
所属品牌：应用材料（AMAT）
核心功能：设备安全联锁与信号控制
配套设备：PVD/IMP等半导体机台
产品特点
专为AMAT半导体设备设计，原厂备件
实时监测腔室门状态、真空度及气体管路
具备安全联锁保护，异常时快速切断电源与气源
采用光电隔离技术，抗干扰能力强
板载状态指示灯，方便故障排查
支持7×24小时连续运行
常见于PVD、IMP等设备
替换时需核对版本号
采购时建议提供主机型号
安装需专业技术人员操作，注意断电安全
综上所述，AMAT 0100-00516 是应用材料半导体设备专用腔室联锁板，负责安全监控与联锁保护，安装前需核对版本号并确认主机兼容性。
Product Specifications
Product Model: AMAT 0100-00516
Product Type: Chamber Interlocking Board
Brand: Applied Materials (AMAT)
Core function: Equipment safety interlocking and signal control
Supporting equipment: PVD/IMP and other semiconductor machines
Product Features
Specially designed for AMAT semiconductor equipment, original spare parts
Real time monitoring of chamber door status, vacuum level, and gas pipeline
Equipped with safety interlock protection, quickly cut off power and gas sources in case of abnormalities
Adopting optoelectronic isolation technology, with strong anti-interference ability
Onboard status indicator light, convenient for troubleshooting
Support continuous operation 24/7
Commonly seen in PVD, IMP and other equipment
When replacing, it is necessary to verify the version number
It is recommended to provide the host model during procurement
Installation requires professional technicians to operate, pay attention to power-off safety
In summary, AMAT 0100-00516 is a specialized chamber interlocking board for semiconductor equipment, responsible for safety monitoring and interlocking protection. Before installation, it is necessary to verify the version number and confirm the compatibility of the host.
3.其他产品
Schneider 140ACI04000 模拟输入模块
AB 1769-IQ32 输入模块
AB 1756-PA75/B 进口电源模块
4.其他产品
AUTOMATION ANC-100E AN-X2-AB-DHRIO robot system module
D674A906U01 Flow meter
DEIF SCM-1 ship controller
| 6410-030-N-N-N | 6DD1681-0AE2 | TRICONEX 9668-110 |
| 6410-024-N-N-N | 6DD1681-0AE1 | TRICONEX 4000164-520 |
| 6410-024-C-N-N | 6DD1680-0BB0 | TRICONEX 4118 |
| 6410-023-N-N-N | 6DD1680-0AJ0 | TRICONEX 4119 |
| 6410-020-N-N-N | 6DD1680-0AH0 | TRICONEX 4000163-510 |
| 6410-012-C-H-N | 6DD1680-0AG0 | TRICONEX 4328 |
| 6410-009-N-N-N | 6DD1680-0AC2 | TRICONEX 4329 |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com/
