AMAT 0090-05537 流量控制器 PDF资料
1.产 品 资 料 介 绍：
产品型号：AMAT 0090-05537
产品类型：质量流量控制器（MFC）
适用介质：工艺气体或化学液体
供电电压：24V DC
输出信号：模拟量或数字量
产品特点
流量控制精度高，重复性好
阀门响应速度快，适合工艺实时调节
流路材质耐腐蚀，适用于特殊化学品
内置温度补偿，减少环境温度影响
密封性能好，适用于真空及高压环境
专为AMAT半导体设备设计，尺寸兼容
支持现场零点与满量程校准
可追溯批次与校准信息
适合高产能连续运行，可靠性高
维护简便，支持定期清洗保养
综上所述，AMAT 0090-05537 是一款适用于半导体设备的高精度流量控制部件。
Product Model: AMAT 0090-05537
Product Type: Mass Flow Controller (MFC)
Applicable medium: process gas or chemical liquid
Power supply voltage: 24V DC
Output signal: analog or digital quantity
Product Features
High precision flow control and good repeatability
Valve response speed is fast, suitable for real-time process adjustment
The material of the flow path is corrosion-resistant and suitable for special chemicals
Built in temperature compensation to reduce the impact of environmental temperature
Good sealing performance, suitable for vacuum and high-pressure environments
Specially designed for AMAT semiconductor equipment, size compatible
Support on-site zero and full-scale calibration
Traceable batch and calibration information
Suitable for high-capacity continuous operation and high reliability
Easy to maintain, supports regular cleaning and maintenance
In summary, AMAT 0090-05537 is a high-precision flow control component suitable for semiconductor equipment.
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| 6DD2920-0AW1 | CACR-SR20SB1BF | SCYC51010 |
| 6DD2920-0AW0 | CACR-SR30SBBFY100 | 3BHB003688R0101 |
| 6DD2920-0AV3 | CACR-PR01AC3ER | 44A751101-G01 |
| 6DD2920-0AV1 | CACR-UIR05050FD | 6ES5513-3LB11 |
| 6DD2920-0AV0 | 6SC6100-0NC11 | GDC806A0101 |
| 6DD2920-0AU1 | CACR-IR020202FC | UNS0119A-P,V101 |
| 6DD2920-0AU0 | CACR-SR30BE12G-E | 6ES5498-1AA51 |
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