Huttinger  962728-00电路板 PDF资料 

1.产 品 资 料 介 绍：

Huttinger 962728-00 电路板

产品概述

Huttinger 962728-00 是一款 工业级控制/驱动电路板（Circuit Board），用于射频发电机、功率放大器及等离子系统中实现信号处理、功率控制及模块间通信。该电路板在系统中承担核心控制和数据传输功能，是保障设备稳定运行和工艺精度的关键组件。

• 型号：962728-00

• 类型：控制/驱动电路板（Circuit Board）

• 功能：信号处理、功率控制、模块间通信

• 应用领域：半导体制造、PVD/CVD 薄膜工艺、等离子处理及科研实验

产品特点

1. 高可靠性设计

• 工业级电路设计，支持长期连续运行，耐高温、抗振动及电磁干扰。

2. 信号与功率处理能力强

• 可精确处理射频或控制信号，实现功率调节和状态反馈。

3. 模块化接口

• 支持与 HUTTINGER 系列发电机、功率放大器及控制模块的灵活连接。

4. 保护功能

• 内置过流、过压和短路保护，提高系统安全性。

5. 应用灵活

• 可用于控制、驱动及信号传输的多种场景，适应复杂工业环境。

应用领域

1. 半导体制造

• 提供稳定控制和信号传输，支持等离子刻蚀、离子注入及薄膜沉积工艺。

2. 薄膜沉积与表面处理

• PVD/CVD 工艺及光学镀膜设备的核心控制电路。

3. 科研实验

• 材料科学、等离子物理及高精度射频实验中的信号控制模块。

4. 工业制造

• 精密表面改性、功能性薄膜加工及连续生产工艺的控制核心。

英文资料：

Huttinger 962728-00 circuit board

Product Overview

Huttinger 962728-00 is an industrial grade control/drive circuit board used for signal processing, power control, and inter module communication in RF generators, power amplifiers, and plasma systems. This circuit board is responsible for core control and data transmission functions in the system, and is a key component to ensure stable equipment operation and process accuracy.

Model: 962728-00

Type: Control/Drive Circuit Board

Function: Signal processing, power control, module to module communication

Application areas: semiconductor manufacturing, PVD/CVD thin film process, plasma treatment, and scientific research experiments

Product Features

High reliability design

Industrial grade circuit design, supporting long-term continuous operation, high temperature resistance, vibration resistance, and electromagnetic interference resistance.

Strong signal and power processing capabilities

It can accurately process RF or control signals, achieve power regulation and status feedback.

Modular interface

Support flexible connection with HUTTINGER series generators, power amplifiers, and control modules.

protection function

Built in overcurrent, overvoltage, and short-circuit protection to enhance system safety.

Flexible application

Can be used in various scenarios for control, driving, and signal transmission, adapting to complex industrial environments.

Application field

Semiconductor Manufacturing

Provide stable control and signal transmission, support plasma etching, ion implantation, and thin film deposition processes.

Thin film deposition and surface treatment

The core control circuit of PVD/CVD process and optical coating equipment.

Scientific research experiment

Signal control module in materials science, plasma physics, and high-precision RF experiments.

industrial manufacturing

The control core of precision surface modification, functional film processing, and continuous production processes.

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