Huttinger 0463787V01调节单元板 PDF资料 

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Huttinger 0463787V01 调节单元板

产品概述

Huttinger 0463787V01 是一款 工业级调节单元板（Regulation Unit Board），用于射频发电机、功率放大器及等离子控制系统中实现功率、电流或电压的精密调节。该模块负责核心调节功能，保证下游设备的稳定运行及工艺一致性。

• 型号：0463787V01

• 类型：调节单元板（Regulation Unit Board）

• 功能：功率/电压/电流调节、控制信号处理、状态监控

• 应用领域：半导体制造、PVD/CVD 薄膜工艺、等离子处理及科研实验

产品特点

1. 高精度调节功能

• 精确控制射频功率、电流或电压，实现稳定输出和工艺一致性。

2. 快速响应

• 调节速度快，能够实时响应系统变化，保证工艺安全性。

3. 工业级可靠性

• 支持长期连续运行，耐高温、抗振动及电磁干扰能力强。

4. 保护机制

• 内置过流、过压、短路及过温保护，防止模块及系统损坏。

5. 模块化设计

• 易于安装、替换和维护，可与 HUTTINGER 系列射频和功率模块兼容。

6. 灵活控制接口

• 支持本地面板操作和远程接口控制，可集成到自动化系统中。

应用领域

1. 半导体制造

• 用于等离子刻蚀、离子注入及薄膜沉积工艺的精密功率调节。

2. 薄膜沉积与表面处理

• PVD/CVD 工艺、光学镀膜及工业涂层的功率或电压调控。

3. 科研实验

• 材料科学、等离子物理及射频实验中核心调节模块。

4. 工业制造

• 精密表面改性、功能性薄膜加工及连续生产工艺设备的控制核心。

英文资料：

Huttinger 0463787V01 regulating unit board

Product Overview

Huttinger 0463787V01 is an industrial grade Regulation Unit Board used for precise regulation of power, current, or voltage in RF generators, power amplifiers, and plasma control systems. This module is responsible for the core regulation function, ensuring the stable operation and process consistency of downstream equipment.

Model: 0463787V01

Type: Regulation Unit Board

Function: power/voltage/current regulation, control signal processing, status monitoring

Application areas: semiconductor manufacturing, PVD/CVD thin film process, plasma treatment, and scientific research experiments

Product Features

High precision adjustment function

Accurately control RF power, current, or voltage to achieve stable output and process consistency.

quick response

Fast adjustment speed, able to respond in real-time to system changes, ensuring process safety.

Industrial grade reliability

Supports long-term continuous operation, with strong resistance to high temperature, vibration, and electromagnetic interference.

protection mechanism

Built in overcurrent, overvoltage, short circuit, and over temperature protection to prevent module and system damage.

modular design

Easy to install, replace, and maintain, compatible with HUTTINGER series RF and power modules.

Flexible control interface

Supports local panel operation and remote interface control, and can be integrated into automation systems.

Application field

Semiconductor Manufacturing

Precision power regulation for plasma etching, ion implantation, and thin film deposition processes.

Thin film deposition and surface treatment

Power or voltage regulation for PVD/CVD processes, optical coatings, and industrial coatings.

Scientific research experiment

Core regulation modules in materials science, plasma physics, and radio frequency experiments.

industrial manufacturing

The control core of precision surface modification, functional film processing, and continuous production process equipment.

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