Huttinger  B38-0021输出模块 PDF资料 

1.产 品 资 料 介 绍：

Huttinger B38-0021 输出模块

产品概述

Huttinger B38-0021 是一款 工业级输出模块（Output Module），用于射频发电机、功率放大器或等离子控制系统中实现信号或功率输出。该模块负责将控制信号转换为可驱动下游设备的输出，确保系统操作的准确性和稳定性。

• 型号：B38-0021

• 类型：输出模块（Output Module）

• 功能：信号/功率输出、控制信号传递、状态反馈

• 应用领域：半导体制造、PVD/CVD 薄膜工艺、等离子处理及科研实验

产品特点

1. 高精度输出

• 提供稳定、精确的输出信号或功率，保证下游设备可靠运行。

2. 工业级设计

• 支持长时间连续运行，耐高温、抗振动及电磁干扰能力强。

3. 保护功能完善

• 内置过流、过压及短路保护，提高模块及系统的安全性。

4. 模块化设计

• 便于安装、替换和维护，支持系统扩展和升级。

5. 兼容性强

• 可与 HUTTINGER 系列射频发电机、功率模块及控制模块配套使用。

6. 多用途应用

• 可输出模拟或数字信号，满足不同控制系统的需求。

应用领域

1. 半导体制造

• 支持等离子刻蚀、离子注入及薄膜沉积工艺的信号/功率输出。

2. 薄膜沉积与表面处理

• PVD/CVD 工艺、光学镀膜及工业涂层设备的核心输出模块。

3. 科研实验

• 材料科学、等离子物理及高精度实验设备中的信号输出模块。

4. 工业制造

• 精密表面改性、功能性薄膜加工及连续生产工艺设备的输出控制。

英文资料：

Huttinger B38-0021 output module

Product Overview

Huttinger B38-0021 is an industrial grade output module used to achieve signal or power output in RF generators, power amplifiers, or plasma control systems. This module is responsible for converting control signals into outputs that can drive downstream devices, ensuring the accuracy and stability of system operation.

Model: B38-0021

Type: Output Module

Function: Signal/power output, control signal transmission, status feedback

Application areas: semiconductor manufacturing, PVD/CVD thin film process, plasma treatment, and scientific research experiments

Product Features

High precision output

Provide stable and accurate output signals or power to ensure reliable operation of downstream equipment.

Industrial-grade design

Supports long-term continuous operation, with strong resistance to high temperature, vibration, and electromagnetic interference.

Complete protection function

Built in overcurrent, overvoltage, and short-circuit protection to enhance the safety of modules and systems.

modular design

Easy to install, replace, and maintain, supporting system expansion and upgrades.

Strong compatibility

Can be used in conjunction with HUTTINGER series RF generators, power modules, and control modules.

Multi purpose application

It can output analog or digital signals to meet the needs of different control systems.

Application field

Semiconductor Manufacturing

Support signal/power output for plasma etching, ion implantation, and thin film deposition processes.

Thin film deposition and surface treatment

Core output module for PVD/CVD process, optical coating, and industrial coating equipment.

Scientific research experiment

Signal output module in materials science, plasma physics, and high-precision experimental equipment.

industrial manufacturing

Output control of precision surface modification, functional film processing, and continuous production process equipment.

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