Huttinger   C4013630103 ID126870射频控制模块 PDF资料 

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Huttinger C4013630103 ID126870 射频控制模块

产品概述

Huttinger C4013630103（ID126870）是一款 工业级射频控制模块，用于精确控制射频发电机、功率放大器及等离子体系统中的射频输出。该模块可实现高精度信号调节、负载匹配控制和保护功能，是半导体制造、薄膜沉积及科研实验等高端工艺的重要组件。

• 型号：C4013630103

• ID：126870

• 类型：射频控制模块（RF Control Module）

• 功能：射频信号控制、功率调节、状态监控

• 应用领域：半导体制造、PVD/CVD 薄膜工艺、等离子处理及科研实验

产品特点

1. 高精度射频控制

• 可对发电机或功率放大器输出的射频功率、电压和电流进行精确调节，确保工艺稳定性。

2. 负载匹配优化

• 与匹配网络协同工作，实现射频系统与负载的最佳阻抗匹配，降低反射功率，提高能量传输效率。

3. 高可靠性设计

• 工业级模块，支持连续长时间运行，抗干扰能力强，适应复杂工业环境。

4. 安全保护功能

• 内置过流、过压及短路保护，防止设备或工艺异常造成损坏。

5. 模块化与兼容性

• 模块化设计，便于安装、替换和维护。

• 与 HUTTINGER 系列射频发电机、功率放大器及匹配网络兼容。

6. 可控性强

• 支持本地控制和远程控制接口，方便集成到自动化工艺系统。

英文资料：

Huttinger C4013630103 ID126870 RF Control Module

Product Overview

Huttinger C4013630103 (ID126870) is an industrial grade RF control module used for precise control of RF output in RF generators, power amplifiers, and plasma systems. This module can achieve high-precision signal regulation, load matching control, and protection functions, and is an important component for high-end processes such as semiconductor manufacturing, thin film deposition, and scientific research experiments.

Model: C4013630103

ID：126870

Type: RF Control Module

Function: RF signal control, power regulation, status monitoring

Application areas: semiconductor manufacturing, PVD/CVD thin film process, plasma treatment, and scientific research experiments

Product Features

High precision RF control

It can accurately adjust the RF power, voltage, and current output by the generator or power amplifier to ensure process stability.

Load matching optimization

Collaborate with the matching network to achieve optimal impedance matching between the RF system and the load, reduce reflected power, and improve energy transmission efficiency.

High reliability design

Industrial grade module, supports continuous long-term operation, strong anti-interference ability, and adapts to complex industrial environments.

Safety protection function

Built in overcurrent, overvoltage, and short-circuit protection to prevent damage caused by equipment or process abnormalities.

Modularity and compatibility

Modular design facilitates installation, replacement, and maintenance.

Compatible with HUTTINGER series RF generators, power amplifiers, and matching networks.

Strong controllability

Supports local and remote control interfaces, facilitating integration into automated process systems.

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