Huttinger TE991290控制卡电路板 PDF资料 

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HUTTINGER TE991290 控制卡电路板

产品概述

Huttinger TE991290 是一款 工业级控制卡电路板，用于高精度射频或等离子系统中对发电机、功率放大器或等离子源进行信号控制和参数调节。该控制卡提供稳定、可靠的控制信号接口，是等离子或射频工艺系统的重要组成部分。

• 型号：TE991290

• 类型：控制卡电路板

• 功能：生成和调节控制信号，用于控制发电机或功率模块

• 应用领域：半导体制造、薄膜沉积、等离子工艺设备、科研实验

技术特点

1. 精确控制能力：对射频或直流发电模块输出电压、电流及功率进行高精度调节。

2. 高可靠性：工业级设计，适合长期连续运行的生产环境。

3. 兼容性强：可与 HUTTINGER 系列发电机、功率放大器及匹配网络配合使用。

4. 模块化设计：便于维护、升级和替换，支持系统扩展。

5. 保护功能：内置过流、过压、短路等保护机制，提高设备安全性。

应用领域

1. 半导体制造

• 等离子刻蚀、离子注入及薄膜沉积等工艺的电源控制。

2. 薄膜沉积与表面处理

• PVD/CVD 薄膜、光学镀膜及工业涂层的精密控制。

3. 科研实验

• 材料科学、等离子物理及高频射频实验的控制核心。

4. 工业生产

• 精密表面改性、功能性薄膜加工及连续生产工艺的控制模块。

英文资料：

HUTTINGER TE991290 Control Card Circuit Board

Product Overview

Huttinger TE991290 is an industrial grade control card circuit board used for signal control and parameter adjustment of generators, power amplifiers, or plasma sources in high-precision RF or plasma systems. This control card provides a stable and reliable control signal interface and is an important component of plasma or RF process systems.

Model: TE991290

Type: Control card circuit board

Function: Generate and adjust control signals for controlling generators or power modules

Application areas: semiconductor manufacturing, thin film deposition, plasma process equipment, scientific research experiments

Technical Features

Precise control capability: high-precision adjustment of output voltage, current, and power of RF or DC power generation modules.

High reliability: Industrial grade design, suitable for long-term continuous operation in production environments.

Strong compatibility: Can be used in conjunction with HUTTINGER series generators, power amplifiers, and matching networks.

Modular design: easy to maintain, upgrade, and replace, supporting system expansion.

Protection function: Built in overcurrent, overvoltage, short circuit and other protection mechanisms to improve equipment safety.

Application field

Semiconductor Manufacturing

Power control for processes such as plasma etching, ion implantation, and thin film deposition.

Thin film deposition and surface treatment

Precision control of PVD/CVD thin films, optical coatings, and industrial coatings.

Scientific research experiment

The control core of materials science, plasma physics, and high-frequency radio frequency experiments.

industrial production

Control module for precision surface modification, functional film processing, and continuous production processes.

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