Huttinger SCALO30等离子直流电源模块 PDF资料 

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HUTTINGER SCALO30 等离子直流电源模块

产品概述

Huttinger SCALO30 是一款专为工业等离子工艺设计的 直流（DC）电源模块，用于为等离子体产生稳定的直流电流。该模块能够在高压低噪声条件下输出精确电流，适用于半导体制造、薄膜沉积以及科研实验等场景。

• 型号：SCALO30

• 类型：等离子直流电源模块

• 输出类型：直流电源（DC）

• 功率范围：可提供高功率稳定输出

• 输入电压：工业标准 AC 电源输入

技术特点

1. 高精度输出：提供稳定直流电流，保证等离子体电弧的稳定性和工艺一致性。

2. 低纹波设计：输出电流噪声小，适合对等离子体工艺敏感的应用。

3. 过流与过压保护：内置保护功能，避免负载异常造成设备损坏。

4. 工业级可靠性：模块化设计，便于集成到各类工业等离子设备中。

5. 可控性强：支持外部控制接口，可实现远程监控与参数调整。

英文资料：

HUTTINGER SCALO30 plasma DC power module

Product Overview

Huttinger SCALO30 is a direct current (DC) power module designed specifically for industrial plasma processes, used to generate stable DC current for plasma. This module is capable of outputting precise current under high voltage and low noise conditions, and is suitable for scenarios such as semiconductor manufacturing, thin film deposition, and scientific research experiments.

Model: SCALO30

Type: Plasma DC power module

Output type: DC power supply

Power range: Can provide high power stable output

Input voltage: Industrial standard AC power input

Technical Features

High precision output: Provides stable DC current to ensure the stability and process consistency of plasma arc.

Low ripple design: Low output current noise, suitable for applications sensitive to plasma processes.

Overcurrent and Overvoltage Protection: Built in protection function to prevent equipment damage caused by abnormal load.

Industrial grade reliability: modular design, easy to integrate into various industrial plasma equipment.

Strong controllability: Supports external control interfaces, enabling remote monitoring and parameter adjustment.

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