AMAT Applied Materials 0500-01065 接口模块 PDF资料 

1.产 品 资 料 介 绍：

AMAT Applied Materials 0500-01065 接口模块

产品应用领域

一、半导体制造设备平台

• 主要应用在 AMAT Centura 系列 300 mm 工艺平台。

• 属于多腔室设备中的 Loadlock（载入锁舱）接口互锁模块，负责大气与真空腔体之间的安全过渡。

二、核心应用场景

1. 晶圆传输过程

• 控制和监测 Loadlock 舱门的开关状态。

• 在晶圆由搬运机器人转入或转出腔体时，确保只有在门完全关闭、真空状态满足要求的条件下，操作才允许进行。

2. 真空与大气隔离

• 监控 Loadlock 内部压力与工艺腔体压力差，确保压力达到安全范围后才允许开启阀门。

• 提供与真空泵、阀门的互锁逻辑，避免误操作造成真空失效。

3. 安全互锁逻辑

• 当检测到门未锁紧、压力不平衡或传感器异常时，阻止腔体与外界或其他腔室的直接连通。

• 提供保护逻辑，避免晶圆污染或设备损坏。

4. 信号接口功能

• 作为 Loadlock 与主控制器（PLC/系统控制计算机）之间的 I/O 接口板，传递门锁状态、传感器反馈及执行信号。

• 负责接口信号的采集与转换，保障控制系统及时响应。

三、典型应用领域

• CVD（化学气相沉积）设备：用于薄膜沉积工艺前后的晶圆装卸与过渡。

• PVD（物理气相沉积）设备：在溅射镀膜设备中作为大气与真空腔室的中间过渡模块。

• 刻蚀设备：保证晶圆在转入高真空刻蚀腔前完成安全隔离。

• 清洗/表面处理设备：在需要频繁进出晶圆的工艺中，确保载入过程不影响真空工艺环境。

四、产品优势（对应应用）

• 提高 安全性：通过硬件互锁逻辑降低操作风险。

• 保证 工艺稳定性：避免因压力或门锁异常影响薄膜沉积、刻蚀等关键步骤。

• 增强 设备可靠性：作为标准化接口模块，可快速更换，减少停机时间。

• 支持 自动化生产：配合晶圆搬运机器人实现高效无误的晶圆传输。

AMAT Applied Materials 0500-01065 接口模块 英文资料：

AMAT Applied Materials 0500-01065 Interface Module

Product application areas

1、 Semiconductor Manufacturing Equipment Platform

Mainly used in the AMAT Centura series 300 mm process platform.

The Loadlock interface interlock module belonging to multi chamber equipment is responsible for the safe transition between atmospheric and vacuum chambers.

2、 Core application scenarios

Wafer transfer process

Control and monitor the switch status of the Loadlock cabin door.

When the wafer is transferred into or out of the chamber by the handling robot, ensure that the operation is only allowed when the door is completely closed and the vacuum state meets the requirements.

Vacuum and atmospheric isolation

Monitor the pressure difference between the internal Loadlock and the process chamber to ensure that the pressure reaches a safe range before allowing the valve to be opened.

Provide interlocking logic with vacuum pumps and valves to avoid vacuum failure caused by misoperation.

Security interlock logic

When the door is not locked, the pressure is unbalanced, or the sensor is abnormal, prevent direct communication between the chamber and the outside or other chambers.

Provide protection logic to prevent wafer contamination or equipment damage.

Signal interface function

As an I/O interface board between Loadlock and the main controller (PLC/system control computer), it transmits door lock status, sensor feedback, and execution signals.

Responsible for collecting and converting interface signals to ensure timely response of the control system.

3、 Typical application areas

CVD (Chemical Vapor Deposition) equipment: used for wafer loading, unloading, and transition before and after thin film deposition processes.

PVD (Physical Vapor Deposition) equipment: used as an intermediate transition module between atmospheric and vacuum chambers in sputtering coating equipment.

Etching equipment: Ensure that the wafer is safely isolated before being transferred to the high vacuum etching chamber.

Cleaning/surface treatment equipment: Ensure that the loading process does not affect the vacuum process environment in processes that require frequent entry and exit of wafers.

4、 Product advantages (corresponding applications)

Improve security: Reduce operational risks through hardware interlock logic.

Ensure process stability: avoid key steps such as film deposition and etching being affected by pressure or abnormal door locks.

Enhance device reliability: As a standardized interface module, it can be quickly replaced to reduce downtime.

Support automated production: collaborate with wafer handling robots to achieve efficient and error free wafer transfer.

AMAT Applied Materials 0500-01065 接口模块 产品展示      

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