AMAT Applied Materials 0050-38614歧管 PDF资料 

1.产 品 资 料 介 绍：

产品概述

AMAT Applied Materials 0050-38614 歧管（Weldment, Manifold, 5 Stat, Right, Nupro）是应用材料公司在半导体设备中使用的流体分配组件。它主要用于气体或液体的多通道分配与控制，通常搭配真空系统、工艺气路或清洗管路。该部件属于焊接歧管组件，由多通道阀体及连接件组成，适用于高纯气体或腐蚀性工艺气体。

技术参数（根据命名推测与行业常规）

• 结构形式：焊接歧管组件

• 通道数：5 通道（5 Station，通常指 5 个气路站位）

• 安装方向：右侧安装（Right 配置）

• 接口类型：Nupro 系列接口（常见于高纯不锈钢阀门与接头）

• 材质：不锈钢（适用于真空与半导体工艺气体环境）

• 用途：气体分配、隔离与切换

应用场景

1. 半导体制造设备

• CVD、PVD、Etch 等工艺腔体的气体供应分配

• 清洗和吹扫气路控制

2. 真空系统

• 多通道气体输入或抽真空切换

3. 化工与材料研究

• 高纯气体输送与混合

4. 实验室自动化

• 精密流体控制与多路分配

产品优势

• 集成度高：5 通道集中在一个焊接歧管中，减少安装空间。

• 密封可靠：Nupro 接口与焊接结构保证了高真空和高纯环境下的气密性。

• 耐腐蚀：不锈钢材质可抵抗常见工艺气体腐蚀。

• 方向明确：右侧安装便于设备内模块化布置。

AMAT Applied Materials 0050-38614歧管 英文资料：

Product Overview

AMAT Applied Materials 0050-38614 manifold (Weldment, Manifold, 5 Stat, Right, Nupro) is a fluid distribution component used by Applied Materials in semiconductor equipment. It is mainly used for multi-channel distribution and control of gases or liquids, usually paired with vacuum systems, process gas circuits, or cleaning pipelines. This component belongs to the welded manifold assembly, consisting of a multi-channel valve body and connecting parts, suitable for high-purity gases or corrosive process gases.

Technical parameters (inferred from naming and industry conventions)

Structural form: welded manifold component

Number of channels: 5 channels (5 stations, usually referring to 5 gas station positions)

Installation direction: Right side installation (Right configuration)

Interface type: Nupro series interface (commonly used in high-purity stainless steel valves and fittings)

Material: Stainless steel (suitable for vacuum and semiconductor process gas environments)

Purpose: Gas distribution, isolation, and switching

Application scenarios

Semiconductor Manufacturing Equipment

Gas supply distribution for CVD, PVD, Etch and other process chambers

Cleaning and blowing air path control

vacuum system

Multi channel gas input or vacuum switching

Chemical and Materials Research

High purity gas transportation and mixing

Laboratory Automation

Precision fluid control and multi-channel distribution

Product advantages

High integration: 5 channels are concentrated in one welded manifold, reducing installation space.

Reliable sealing: The Nupro interface and welding structure ensure airtightness in high vacuum and high-purity environments.

Corrosion resistance: Stainless steel material can resist common process gas corrosion.

Clear direction: Installation on the right side facilitates modular layout within the equipment.

AMAT Applied Materials 0050-38614歧管 产品展示      

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