Gasonics 90-1033-02温度控制卡 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics 90-1033-02 温度控制卡
产品应用领域
半导体设备温控系统
主要用于 Gasonics 等品牌的等离子体清洗机、灰化设备等半导体制造设备中，对工艺腔体温度进行精确控制，确保清洗和刻蚀工艺稳定。真空腔体温度调节
在真空环境下的等离子处理过程中，温度控制卡可通过反馈机制调节加热元件的输出，保持腔体或工件表面温度恒定，避免热漂移。等离子灰化工艺控制
用于控制反应腔体加热区域的温度曲线，确保光刻胶去除过程中的温度稳定性，提高处理一致性和良率。热处理平台温度稳定系统
适用于控制加热台、热板等温度控制组件，实现多点温度监测和闭环调节，提高热处理均匀性。工业自动化温度调节
在某些与Gasonics设备集成的自动化系统中，该卡也可能被用于工业过程中的精密温控应用，例如自动化工站中的材料预热系统。设备维护与替换配件市场
作为 Gasonics 原厂设备的关键控制部件，常用于设备维护、备件更换和系统升级，以维持设备在最佳状态下运行。
英文资料：
product name
Gasonics 90-1033-02 Temperature Control Card
Product application areas
Semiconductor equipment temperature control system
Mainly used in semiconductor manufacturing equipment such as plasma cleaning machines and ashing equipment of Gasonics and other brands, it precisely controls the temperature of the process chamber to ensure stable cleaning and etching processes.
Vacuum chamber temperature regulation
During plasma processing in a vacuum environment, the temperature control card can adjust the output of the heating element through a feedback mechanism to maintain a constant temperature of the cavity or workpiece surface and avoid thermal drift.
Plasma ashing process control
Used to control the temperature curve of the heating area in the reaction chamber, ensuring temperature stability during the photoresist removal process, and improving processing consistency and yield.
Temperature stabilization system for heat treatment platform
Suitable for controlling temperature control components such as heating tables and hot plates, achieving multi-point temperature monitoring and closed-loop regulation, and improving the uniformity of heat treatment.
Industrial automation temperature regulation
In some automation systems integrated with Gasonics equipment, this card may also be used for precision temperature control applications in industrial processes, such as material preheating systems in automated chemical plants.
Market for equipment maintenance and replacement parts
As a key control component of Gasonics original equipment, it is commonly used for equipment maintenance, spare parts replacement, and system upgrades to maintain optimal equipment operation.
2.产 品 展 示
3.其他产品
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