Gasonics  95-0296 A LCD组件 PDF资料 

1.产 品 资 料 介 绍：

Gasonics 95-0296 A LCD组件 是用于Gasonics等离子设备（如剥离、清洗或蚀刻机）中的显示模块，主要承担操作界面显示和信息反馈功能。以下是其详细的产品应用领域分析：

一、产品概述

Gasonics 95-0296 A 是一款集成LCD（液晶显示）屏幕的显示组件，安装于Gasonics品牌的半导体工艺设备中，作为人机界面（HMI）的一部分，用于显示运行状态、参数设定、错误信息等。

二、应用领域

1. 半导体制造设备

• 应用于 Gasonics 的等离子剥离系统（如 PEP、Aura 系列等），用于显示系统状态、工艺参数和报警信息。

• 提供工艺操作员对工艺条件（如RF功率、气体流量、腔体真空度等）的实时监控。

2. LCD/OLED 显示面板生产线

• 在薄膜沉积（如PVD、CVD）或剥离设备中提供人机界面显示，是工艺控制系统的一部分。

• 用于平板显示器（FPD）加工设备的状态显示。

3. 微电子封装及MEMS制造

• 安装在等离子表面处理设备中，用于增强键合前的表面清洁工艺，确保封装质量。

• 显示MEMS器件加工过程中的关键参数。

4. 科研及工艺开发平台

• 一些高端实验室或研发平台会使用Gasonics设备进行先进封装或新材料表面处理研究，该LCD组件用于数据显示和控制交互。

英文资料：

The Gasonics 95-0296 A LCD module is a display module used in Gasonics plasma equipment (such as stripping, cleaning, or etching machines), mainly responsible for displaying the operating interface and providing information feedback functions. The following is a detailed analysis of its product application areas:

1、 Product Overview

Gasonics 95-0296 A is a display component with an integrated LCD (liquid crystal display) screen, installed in Gasonics brand semiconductor process equipment as part of the human-machine interface (HMI), used to display operating status, parameter settings, error messages, etc.

2、 Application Fields

1. Semiconductor manufacturing equipment

Applied to Gasonics plasma stripping systems (such as PEP, Aura series, etc.), used to display system status, process parameters, and alarm information.

Provide real-time monitoring of process conditions (such as RF power, gas flow rate, chamber vacuum, etc.) by process operators.

2. LCD/OLED display panel production line

Providing human-machine interface display in thin film deposition (such as PVD, CVD) or stripping equipment is part of the process control system.

Used for status display of flat panel display (FPD) processing equipment.

3. Microelectronics packaging and MEMS manufacturing

Installed in plasma surface treatment equipment to enhance the surface cleaning process before bonding and ensure packaging quality.

Display key parameters during the processing of MEMS devices.

4. Research and process development platform

Some high-end laboratories or R&D platforms use Gasonics equipment for advanced packaging or new material surface treatment research, with LCD components used for data display and control interaction.

2.产      品      展      示      

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