Gasonics A95-053-02灯照明器电源盒组件 PDF资料
1.产 品 资 料 介 绍：
产品概述：
Gasonics A95-053-02 是一款用于半导体设备的灯照明器电源盒组件，主要负责为系统中的照明单元（如紫外灯或氙灯）提供稳定的电力供应，确保光照系统在工艺过程中的正常运行。它是Gasonics/Novellus系列等离子处理设备的重要辅助模块。
技术参数（典型）：
电源类型：工业级灯光照明电源
输入电压：依设备型号支持，常为AC 110V / 220V
输出特性：稳定直流/脉冲供电，用于驱动UV/氙灯
适配系统：Gasonics Aura 1000、Aura 2000、L3510 等机型
结构形式：盒式金属封装，含内部稳压与控制电路
连接方式：多引脚接口，与主控系统进行通信与供电
应用场景：
等离子体灰化工艺（Plasma Asher）
提供光源支持，用于清除光刻胶或工艺残留。掩模/晶圆表面检测
提供均匀高亮度照明以配合检测系统观察微小缺陷。半导体设备灯照系统
驱动光源单元，确保设备工作舱室内照明稳定可靠。Gasonics 等离子剥离系统
作为 Gasonics 品牌旧型号设备的原装或替代配件。
产品优势：
为光源单元提供稳定可靠的电力输出
安装维护方便，易于集成进原厂系统
与Gasonics多款老型号设备兼容性好
提高等离子清洗与检查过程的照明精度与可靠性
英文资料：
Product Overview:
Gasonics A95-053-02 is a power box component for lighting fixtures used in semiconductor equipment, mainly responsible for providing stable power supply to lighting units (such as ultraviolet lamps or xenon lamps) in the system, ensuring the normal operation of the lighting system during the process. It is an important auxiliary module of Gasonics/Novellus series plasma processing equipment.
Technical parameters (typical):
Power type: Industrial grade lighting power supply
Input voltage: Supported by device model, usually AC 110V/220V
Output characteristics: Stable DC/pulse power supply, used to drive UV/xenon lamps
Adaptation system: Gasonics Aura 1000, Aura 2000, L3510 and other models
Structural form: Box metal package, including internal voltage regulation and control circuit
Connection method: Multi pin interface for communication and power supply with the main control system
Application scenarios:
Plasma Asher Process
Provide light source support for removing photoresist or process residues.
Mask/wafer surface inspection
Provide uniform high brightness illumination to assist the detection system in observing minor defects.
Semiconductor equipment lighting system
Drive the light source unit to ensure stable and reliable lighting in the equipment cabin.
Gasonics plasma stripping system
As an original or replacement accessory for old models of Gasonics brand equipment.
Product advantages:
Provide stable and reliable power output for the light source unit
Easy to install and maintain, easy to integrate into the original factory system
Good compatibility with multiple old models of Gasonics equipment
Improve the illumination accuracy and reliability of plasma cleaning and inspection processes
2.产 品 展 示
3.其他产品
ABB CHBX01R 2VAA008575R1 冗余模块底座
4.其他英文产品
ASEA DSPC150 Robot Control Board
| PMB31D-10100-03 | NKLS110 | 3BSX426978R2 DSTK 150 |
| PMB31D-10100-02 | 07ZG60R1 | PFTL101A 0.5KN 3BSE004160R1 |
| PMB31D-10100-01 | IMFAI01 | 3BUP001191R1 CI545V01 |
| PMB31D-10100-00 | AMAT 0100-02389 | P2HNRXC-LSN-NS-03 |
| PMB31D-00216-03 | 07PS62R1 | PFTL101B 20.0KN 3BSE004203R1 |
| PMB31D-00216-02 | 70 BL 31a | 57120001-PM DSTX 160 |
