TEL Tokyo Electron 381-640600-1限制板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 381-640600-1 限制板
产品类别：限制板（Limiter Board）
制造商：Tokyo Electron (TEL)
型号：381-640600-1
一、主要功能
信号保护：限制电压、电流或噪声，防止电路损坏。
信号调节：维持通信或控制信号在安全范围内。
静电抑制：防止静电放电（ESD）影响后端电子模块。
模块隔离：起到信号缓冲或电气隔离作用，减少干扰。
二、典型应用领域
半导体设备中的电路保护
常用于 CVD、Etch、PVD、清洗系统等内部模块之间的信号过渡保护。
晶圆处理系统
在晶圆搬运、加热、冷却或真空腔体接口中，限制突波信号。
RF/高频电源系统
在射频电源输出至等离子腔体的通道上，用于保护射频链路。
真空设备的控制接口
防止控制信号因电源波动或外部干扰造成设备误动作。
光刻/显影系统接口模块
在光刻机或显影系统中连接执行器与控制板，限制异常信号影响。
英文资料：
TEL Tokyo Electron 381-64060-1 restriction board
Product Category: Limiter Board
Manufacturer: Tokyo Electron (TEL)
Model: 381-64060-1
1、 Main functions
Signal protection: Limit voltage, current, or noise to prevent circuit damage.
Signal conditioning: Maintaining communication or control signals within a safe range.
Static electricity suppression: prevents electrostatic discharge (ESD) from affecting the backend electronic module.
Module isolation: It serves as a signal buffer or electrical isolation to reduce interference.
2、 Typical application areas
Circuit protection in semiconductor equipment
Commonly used for signal transition protection between internal modules such as CVD, Etch, PVD, and cleaning systems.
Wafer processing system
Limit surge signals in wafer handling, heating, cooling, or vacuum chamber interfaces.
RF/High Frequency Power Supply System
Used to protect the RF link on the channel from the RF power output to the plasma chamber.
Control interface of vacuum equipment
Prevent equipment misoperation caused by power fluctuations or external interference in control signals.
Lithography/development system interface module
Connect actuators and control boards in lithography machines or development systems to limit the impact of abnormal signals.
2.产 品 展 示
3.其他产品
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