Novellus Systems 02-00315-01接口模块  PDF资料 

1.产 品 资 料 介 绍：

中文资料：

Novellus Systems 02-00315-01 接口模块 是一款用于半导体制造设备的关键电子组件，主要用于在控制系统与外部设备之间进行信号和数据传输。该模块通常用于 Novellus 的沉积设备（如 PECVD、SACVD、HDPCVD 或金属沉积系统）中，起着“桥梁”作用。

一、基本信息

• 产品名称：接口模块（Interface Module）

• 型号：02-00315-01

• 制造商：Novellus Systems Inc.（已被 Lam Research 收购）

• 用途：连接主控制系统与外围传感器、执行器、通信总线等，完成 I/O 映射和信号处理。

二、功能特点

1. I/O 接口管理：提供数字/模拟输入输出通道，允许设备控制器与外围设备通信。

2. 信号隔离：内置隔离保护，防止静电或电气干扰影响核心控制逻辑。

3. 模块化设计：支持热插拔或便捷更换，适用于多种 Novellus 工艺平台。

4. 数据中继：可能作为中间节点与 PLC、计算机、传感器、执行机构之间传递命令和反馈。

三、典型应用设备

此类接口模块多应用于 Novellus Systems 的以下设备系列中：

• Concept One/Two/Three 系列：广泛用于 CVD 工艺。

• Speed 系列系统：用于高通量沉积工艺。

• ALTUS 系列：原子层沉积（ALD）设备。

英文资料：

The Novellus Systems 02-00315-01 interface module is a critical electronic component used in semiconductor manufacturing equipment, primarily for signal and data transmission between control systems and external devices. This module is typically used in Novellus deposition equipment such as PECVD, SACVD, HDPCVD, or metal deposition systems, serving as a "bridge".

1、 Basic Information

Product Name: Interface Module

Model: 02-00315-01

Manufacturer: Novellus Systems Inc. (acquired by Lam Research)

Purpose: To connect the main control system with peripheral sensors, actuators, communication buses, etc., and complete I/O mapping and signal processing.

2、 Functional Features

I/O interface management: Provides digital/analog input/output channels, allowing device controllers to communicate with peripheral devices.

Signal isolation: Built in isolation protection to prevent static electricity or electrical interference from affecting the core control logic.

Modular design: supports hot swapping or easy replacement, suitable for multiple Novellus process platforms.

Data relay: may act as an intermediate node to transmit commands and feedback between PLCs, computers, sensors, and actuators.

3、 Typical application devices

This type of interface module is commonly used in the following device series of Novellus Systems:

Concept One/Two/Tree series: widely used in CVD processes.

Speed series system: used for high-throughput deposition processes.

ALTUS series: Atomic Layer Deposition (ALD) equipment.

2.产      品      展      示      

3.其他产品

ABB GDD471A001 接口板模块

BENTLY 3500/22M 146031-01瞬态数据接口模块

KOLLMORGEN AKM42E-EKGNR-01伺服电机

4.其他英文产品

ASEA SNAT-7902 inverter

DS200TCEAG1BNE emergency overspeed board

ASEA DSQC223 Robot Control Board

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