KLA Tencor 710-659274-00单轴控制器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 710-659274-00 单轴控制器是一种专为精密运动控制而设计的高性能控制模块，广泛应用于半导体制造与检测设备中。以下是其主要产品应用领域：
一、半导体设备
晶圆检测系统（Wafer Inspection）
用于驱动和控制晶圆载台的单轴精密移动，实现高分辨率扫描和定位。
例如在Surfscan、e-Beam或光学检测系统中，确保精确线扫或点检位置。
光刻机（Photolithography）
控制掩膜或晶圆平台的线性移动，实现亚微米级对准。
与激光干涉仪系统协同，确保稳定轨迹与同步反馈。
量测系统（Metrology Tools）
用于控制探头、激光或摄像头的单轴滑动，实现对厚度、步高、CD等参数的精准测量。
支持闭环控制与快速响应机制。
二、精密加工与纳米级运动平台
在纳米压印、精密蚀刻、离子注入等设备中，用于驱动移动组件，实现高速度与低误差加工。
控制单轴滑台以进行样品搬运、工艺流程切换。
三、显微镜成像与缺陷分析
用于电子显微镜系统（如SEM或TEM）中控制样本托盘的X/Y/Z单轴运动，以获得多角度成像。
支持对缺陷区域的精准复查与自动重定位。
英文资料：
The KLA Tencor 710-659274-00 single axis controller is a high-performance control module designed specifically for precision motion control, widely used in semiconductor manufacturing and testing equipment. The following are the main application areas of its products:
1、 Semiconductor equipment
Wafer Inspection System
Used for driving and controlling the single axis precision movement of wafer stages, achieving high-resolution scanning and positioning.
For example, in Surfscan, e-beam, or optical detection systems, ensure precise line scanning or spot checking positions.
Photolithography machine
Control the linear movement of the mask or wafer platform to achieve sub micron level alignment.
Collaborate with the laser interferometer system to ensure stable trajectory and synchronized feedback.
Metrology Tools
Used to control the single axis sliding of probes, lasers or cameras, achieving precise measurement of parameters such as thickness, step height, CD, etc.
Support closed-loop control and fast response mechanism.
2、 Precision machining and nanoscale motion platform
Used in nanoimprint, precision etching, ion implantation and other equipment to drive moving components and achieve high-speed and low error processing.
Control the single axis slide table for sample handling and process flow switching.
3、 Microscopic imaging and defect analysis
Used for controlling the X/Y/Z uniaxial movement of sample trays in electron microscopy systems (such as SEM or TEM) to obtain multi angle imaging.
Support precise re examination and automatic repositioning of defect areas.
2.产 品 展 示
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| PFCL201C/CD | 6SC6100-0NA01 | MC-PAOY22 |
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