TEL Tokyo Electron  381-500244-3内存板 PDF资料 

1.产 品 资 料 介 绍：

中文资料：

TEL Tokyo Electron 381-500244-3 内存板
产品应用领域简述：

一、应用领域

1. 半导体制造设备主控系统

• 用于Tokyo Electron设备中的主控单元，协助处理控制命令和工艺程序。

2. 数据缓存与临时存储

• 在设备运行过程中临时缓存图像数据、工艺配方、传感器信号等，支持实时响应。

3. 设备运行配方管理

• 存储和调用各类工艺配方（Recipe），保障快速、高效切换不同工艺流程。

4. 报警与状态日志记录

• 设备运行产生的状态变化、报警信息可临时保存在内存中，供系统调用与维护分析。

5. 与人机界面（HMI）的数据交互支持

• 协助HMI系统实时显示设备状态、输入输出操作结果。

二、典型应用设备

• TEL 蚀刻设备（如 Telius 系列）

• TEL 化学气相沉积设备（如 Unity 系列）

• TEL 湿法清洗设备（如 Expedius 系列）

• TEL 涂胶/显影设备（如 Mark Vz 系列）

三、技术特点（概述）

• 工业级PCB内存板，适应高洁净、高温控制环境

• 与TEL主控模块高速连接，执行临时数据处理任务

• 具备多通道存取能力，提升数据吞吐效率

• 可靠性高，支持长时间不间断运行

英文资料：

TEL Tokyo Electron 381-500244-3 Memory Board

Product application field description:

1、 Application Fields

Main control system for semiconductor manufacturing equipment

Used as the main control unit in Tokyo Electron devices to assist in processing control commands and process programs.

Data caching and temporary storage

Temporarily cache image data, process formulas, sensor signals, etc. during device operation, supporting real-time response.

Equipment operation formula management

Store and call various process recipes to ensure fast and efficient switching between different process flows.

Alarm and status logging

The state changes and alarm information generated by device operation can be temporarily saved in memory for system call and maintenance analysis.

Data interaction support with human-machine interface (HMI)

Assist the HMI system in displaying device status and input/output operation results in real-time.

2、 Typical application devices

TEL etching equipment (such as Telius series)

TEL chemical vapor deposition equipment (such as Unity series)

TEL wet cleaning equipment (such as Expediaus series)

TEL coating/developing equipment (such as Mark Vz series)

3、 Technical Features (Overview)

Industrial grade PCB memory board, suitable for high cleanliness and high temperature control environment

Connect with TEL main control module at high speed to perform temporary data processing tasks

Capable of multi-channel access, improving data throughput efficiency

High reliability, supporting long-term uninterrupted operation

2.产      品      展      示      

3.其他产品

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ABB  ACS-RTAC-01 64610805接口模块

ABB CHBX01R 2VAA008575R1 冗余模块底座

4.其他英文产品

RADISYS 061-05927-0031 adapter module

KOLLMORGEN S70602-NANANA servo/driver

ASEA ES1530b module card board

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