AMAT Applied Materials 0100-01691高压气体联锁模块 PDF资料
1.产 品 资 料 介 绍：
AMAT Applied Materials 0100-01691 是一款高压气体联锁模块，主要用于半导体设备中，确保高压气体系统的安全性和稳定性。该模块通常用于气体面板（Gas Panel）中，负责监控和控制气体流量、压力等参数，以防止因气体异常导致的设备故障或安全事故。
产品特点
功能定位
用于高压气体系统的安全联锁，确保气体供应的稳定性和安全性。结构设计
采用模块化设计，便于安装和维护，适应半导体设备的空间要求。兼容性
与 AMAT 的多种半导体设备兼容，确保系统的稳定运行。控制方式
可能采用电气或气动方式进行气体流量和压力的控制。性能稳定
高品质材料和精密加工保证在高压环境下仍能稳定可靠工作。安全保护
内置限流装置和故障检测功能，防止气体操作异常导致的设备损坏。安装方式
设计为易于安装和拆卸的模块，便于设备集成和维护。维护便利
模块化结构便于更换零件和进行定期维护，减少停机时间。质量保证
为全新未使用产品，原包装密封，确保设备的完整性和可靠性。市场供应
在二手设备市场上有售，价格根据新旧程度和版本有所不同。
总结
AMAT 0100-01691 高压气体联锁模块是半导体设备中关键的安全控制模块，通过精确调节气体流量和压力，确保高压气体系统的稳定性和安全性。其模块化设计便于安装和维护，广泛应用于半导体制造过程中的气体控制系统。
AMAT Applied Materials 0100-01691高压气体联锁模块 英文介绍
AMAT Applied Materials 0100-01691 is a high-pressure gas interlock module mainly used in semiconductor equipment to ensure the safety and stability of high-pressure gas systems. This module is typically used in gas panels to monitor and control parameters such as gas flow rate and pressure, in order to prevent equipment failures or safety accidents caused by gas anomalies.
Product Features
functional positioning
Used for safety interlocking in high-pressure gas systems to ensure the stability and safety of gas supply.
structural design
Adopting modular design for easy installation and maintenance, adapting to the space requirements of semiconductor equipment.
compatibility
Compatible with various semiconductor devices of AMAT to ensure stable operation of the system.
Control method
Electrical or pneumatic methods may be used to control gas flow and pressure.
stable performance
High quality materials and precision machining ensure stable and reliable operation even in high-pressure environments.
safety protection
Built in current limiting device and fault detection function to prevent equipment damage caused by abnormal gas operation.
Installation method
Designed as a module that is easy to install and disassemble, facilitating equipment integration and maintenance.
Convenient maintenance
The modular structure facilitates the replacement of parts and regular maintenance, reducing downtime.
quality assurance
For brand new unused products, the original packaging is sealed to ensure the integrity and reliability of the equipment.
Market supply
It is available in the second-hand equipment market, and the price varies depending on the age and version.
summary
The AMAT 0100-01691 high-pressure gas interlock module is a critical safety control module in semiconductor equipment, which ensures the stability and safety of high-pressure gas systems by accurately adjusting gas flow and pressure. Its modular design facilitates installation and maintenance, and is widely used in gas control systems in semiconductor manufacturing processes.
AMAT Applied Materials 0100-01691高压气体联锁模块 产品展示
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| PFEL111 | AMAT 0100-00-01486 | PFTL101A 2.0KNK |
| PFEA113 | AMAT 0100-00192 | PFEA113-20 |
| PFEA112 | AMAT 0100-00133 | PFTL101A 2.0KNK |
| PFEA111 | AMAT 0100-09156 | PFTL 201CE-20.0KN |
| PFEA101 | AMAT 0100-20000 | PFTL 101BE-5.0KN |
| PFCL301E | AMAT 0100-02393 | PFEA112-20 |
| PFCL201CE | AMAT 0041-39086 | PFTL 101B-2.0KN |
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