AMAT Applied Materials 0010-26057晶圆升降组件 PDF资料
1.产 品 资 料 介 绍:
AMAT Applied Materials 0010-26057 晶圆升降组件 — 产品特点
功能定位
用于半导体设备中晶圆的升降与位置控制,实现晶圆在处理工序中的精确移动。结构设计
模块化设计,采用高强度耐磨材料,保证长期稳定运行。驱动方式
通常采用伺服电机或步进电机驱动,实现精确定位和可控升降速度。精度与重复性
高精度机械结构,确保晶圆升降过程的重复定位精度。安装方式
设计为易于安装和拆卸的模块,便于设备集成和维护。兼容性
与多种 AMAT 半导体处理设备兼容,支持不同尺寸晶圆操作。安全保护
内置限位装置、防撞结构,防止晶圆或组件损坏。维护便利
模块化结构便于更换零件和进行定期维护,减少停机时间。性能稳定
高品质材料和精密加工保证在高频运行下仍能稳定可靠工作。应用场景
广泛应用于半导体制造设备的晶圆搬运、涂胶、刻蚀、清洗等工序。
总结:
AMAT 0010-26057 晶圆升降组件是半导体设备中关键的搬运模块,通过高精度机械结构和可靠驱动,实现晶圆在工序间的精确升降与定位,模块化设计便于安装和维护,保证设备运行稳定。
AMAT Applied Materials 0010-26057晶圆升降组件 英文介绍
AMAT Applied Materials 0010-26057 Wafer Lift Assembly - Product Features
functional positioning
Used for the lifting and position control of wafers in semiconductor equipment, achieving precise movement of wafers during processing.
structural design
Modular design, using high-strength wear-resistant materials to ensure long-term stable operation.
Drive Type
Usually driven by servo motors or stepper motors, precise positioning and controllable lifting speed are achieved.
Accuracy and repeatability
High precision mechanical structure ensures the repeated positioning accuracy of the wafer lifting process.
Installation method
Designed as a module that is easy to install and disassemble, facilitating equipment integration and maintenance.
compatibility
Compatible with various AMAT semiconductor processing equipment and supports wafer operations of different sizes.
safety protection
Built in limit device and anti-collision structure to prevent damage to wafers or components.
Convenient maintenance
The modular structure facilitates the replacement of parts and regular maintenance, reducing downtime.
stable performance
High quality materials and precision machining ensure stable and reliable operation even at high frequencies.
Application scenarios
Widely used in wafer handling, coating, etching, cleaning and other processes of semiconductor manufacturing equipment.
Summary:
AMAT 0010-26057 wafer lifting module is a key handling module in semiconductor equipment. Through high-precision mechanical structure and reliable driving, it achieves precise lifting and positioning of wafers between processes. The modular design is easy to install and maintain, ensuring stable equipment operation.
AMAT Applied Materials 0010-26057晶圆升降组件 产品展示
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PMA42M-10100-00 | AMAT 0100-09041 | PFTL 101AE-0.5 |
PMA42M-01100-00 | Amat 0100-03499 | PFTL 101BER-20.0KN |
PMA42M-00100-00 | Amat 0100-35060 | PFTL 201DE-100.0KN |
PMA24K-1050B-02 | Amat 0100-09320 | PFTL 201CE-10.0KN |
PMA24D-10100-00 | AMAT 0100-09081 | PFTL 101AER-2.0KN |
PMA24D-00100-00 | AMAT 0100-20091 | PFTL 301E-0.2 |
PMA24C-11100-00 | AMAT 0100-20321 | PFTL 101AE-1.0KN |
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