AMAT Applied Materials 0010-81309温度控制单元组件 PDF资料
1.产 品 资 料 介 绍:
AMAT Applied Materials 0010-81309 温度控制单元组件 产品特点
一、产品概述
AMAT 0010-81309 温度控制单元组件是 Applied Materials 半导体设备中用于精密温度管理的核心模块。
它通常用于腔体加热、基板加热器或工艺环境的温度调节,通过调节功率输出、采集温度反馈信号,实现高精度温控。
该组件在半导体工艺中保障温度稳定性,是实现工艺一致性和设备安全的重要基础单元。
二、主要产品特点
高精度温度控制
支持对加热器或冷却器进行精确控制,实现快速响应和稳定温度维持,满足工艺对温度的严格要求。多通道控制能力
可同时控制多个加热或冷却通道,适用于复杂腔体或多区域温控需求。实时温度反馈与调节
集成温度传感器信号采集与闭环控制功能,实现实时调整功率输出,确保温度稳定性。安全保护功能
内置过流、过压、过温及短路保护,防止温控单元或加热元件损坏,保证设备运行安全。工业级可靠性设计
采用高品质功率半导体器件、散热设计和电气隔离,具备耐高温、抗振动、耐湿及抗电磁干扰能力。模块化结构
标准化插拔接口设计,便于安装、维护和快速更换,减少设备停机时间。系统兼容性
可与 AMAT 控制器模块、加热器驱动、传感器模块及 I/O 模块无缝对接,实现温控数据的集中管理与工艺调节。监控与故障报警
支持通道状态监控、温度异常报警和自诊断功能,为运维和工艺优化提供支持。
AMAT Applied Materials 0010-81309温度控制单元组件 英文介绍
AMAT Applied Materials 0010-81309 Temperature Control Unit Component Product Features
1、 Product Overview
The AMAT 0010-81309 temperature control unit component is the core module used for precision temperature management in Applied Materials semiconductor equipment.
It is commonly used for chamber heating, substrate heating, or temperature regulation in process environments, achieving high-precision temperature control by adjusting power output and collecting temperature feedback signals.
This component ensures temperature stability in semiconductor processes and is an important foundational unit for achieving process consistency and equipment safety.
2、 Main product features
High precision temperature control
Support precise control of heaters or coolers to achieve fast response and stable temperature maintenance, meeting the strict temperature requirements of the process.
Multi channel control capability
It can simultaneously control multiple heating or cooling channels, suitable for temperature control requirements in complex chambers or multiple areas.
Real time temperature feedback and regulation
Integrate temperature sensor signal acquisition and closed-loop control functions to achieve real-time adjustment of power output and ensure temperature stability.
Security protection function
Built in overcurrent, overvoltage, overtemperature, and short-circuit protection to prevent damage to the temperature control unit or heating element, ensuring safe operation of the equipment.
Industrial grade reliability design
Adopting high-quality power semiconductor devices, heat dissipation design, and electrical isolation, it has the ability to withstand high temperatures, vibrations, humidity, and electromagnetic interference.
Modular structure
Standardized plug-in interface design facilitates installation, maintenance, and quick replacement, reducing equipment downtime.
System Compatibility
It can seamlessly integrate with AMAT controller modules, heater drivers, sensor modules, and I/O modules to achieve centralized management and process adjustment of temperature control data.
Monitoring and fault alarm
Support channel status monitoring, temperature anomaly alarm, and self diagnostic functions to provide support for operation and process optimization.
AMAT Applied Materials 0010-81309温度控制单元组件 产品展示
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