AMAT Applied Materials 0190-34212气体分析仪 PDF资料 

1.产 品 资 料 介 绍：

AMAT Applied Materials 0190-34212 气体分析仪 产品特点

一、产品概述
AMAT 0190-34212 气体分析仪是 Applied Materials 半导体设备中用于实时监测工艺气体成分和浓度的关键模块。
它通常安装在气体面板或工艺腔体气路系统中，通过对输入气体的化学成分进行分析，为工艺控制系统提供精确数据，实现工艺参数调节和安全监控。
该模块广泛应用于 PVD、CVD、Etch 等半导体工艺中，是保障工艺一致性和设备安全的重要工具。

二、主要产品特点

1. 高精度气体检测
    能够检测多种气体成分和浓度，采样精度高，满足半导体工艺对气体纯度和混合比例的严格要求。

2. 快速响应时间
    集成高速传感器与处理电路，实现实时监测和快速反馈，为工艺系统提供及时数据。

3. 多通道气体输入
    支持多个气体通道同时分析，适用于复杂的多气体混合与分配系统。

4. 数据输出接口多样
    提供模拟量输出、数字接口或通信总线，可与 AMAT 控制器模块、数据采集系统及监控软件无缝集成。

5. 工业级稳定性
    采用耐腐蚀、耐高温的材料和工业级元件，适应半导体洁净室环境及长期连续运行条件。

6. 安全与报警功能
    可监测异常气体浓度，触发报警或安全联锁信号，确保工艺安全与设备保护。

7. 模块化与易维护性
    标准化安装设计，便于更换、维护或升级，减少设备停机时间。

8. 系统兼容性强
    专为 AMAT 半导体设备设计，可与各系列控制器、气动控制板及分析模块协调工作，实现整体工艺监控。

AMAT Applied Materials 0190-34212气体分析仪 英文介绍

AMAT Applied Materials 0190-34212 Gas Analyzer Product Features

1、 Product Overview

The AMAT 0190-34212 gas analyzer is a key module used in Applied Materials semiconductor equipment for real-time monitoring of process gas composition and concentration.

It is usually installed in gas panels or process chamber gas systems, and provides accurate data for process control systems by analyzing the chemical composition of input gases, achieving process parameter adjustment and safety monitoring.

This module is widely used in semiconductor processes such as PVD, CVD, and Etch, and is an important tool for ensuring process consistency and equipment safety.

2、 Main product features

High precision gas detection

Capable of detecting various gas components and concentrations, with high sampling accuracy, meeting the strict requirements of semiconductor processes for gas purity and mixing ratios.

Fast response time

Integrating high-speed sensors and processing circuits to achieve real-time monitoring and rapid feedback, providing timely data for process systems.

Multi channel gas input

Supports simultaneous analysis of multiple gas channels, suitable for complex multi gas mixing and distribution systems.

Diverse data output interfaces

Provide analog output, digital interface or communication bus, which can be seamlessly integrated with AMAT controller module, data acquisition system and monitoring software.

Industrial grade stability

Adopting corrosion-resistant and high-temperature resistant materials and industrial grade components, suitable for semiconductor cleanroom environment and long-term continuous operation conditions.

Safety and alarm functions

It can monitor abnormal gas concentrations, trigger alarms or safety interlock signals, and ensure process safety and equipment protection.

Modularity and ease of maintenance

Standardized installation design facilitates replacement, maintenance, or upgrading, reducing equipment downtime.

High compatibility 

Specially designed for AMAT semiconductor equipment, it can coordinate with various series of controllers, pneumatic control boards, and analysis modules to achieve overall process monitoring.

AMAT Applied Materials 0190-34212气体分析仪 产品展示      

3.其他产品

BENDER IRDH265-2绝缘检测器
REXROTH VT-VPCD-1-16/V0/1-P-1可编程控制器
TRICONEX 3704E 数字量输入模块 

4.其他英文产品

YOKOGAWA PW501 input unit module
YOKOGAWA YNT511D input unit module
1336-L4 Input module

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：AMAT Applied Materials

型号：0190-34212气体分析仪

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货