AMAT Applied Materials 0190-35176加热器驱动 PDF资料
1.产 品 资 料 介 绍:
AMAT Applied Materials 0190-35176 加热器驱动 产品特点
一、产品概述
AMAT 0190-35176 加热器驱动是 Applied Materials 半导体设备中用于控制加热元件功率的核心模块。
它主要作用于设备的腔体加热系统、基板加热器或其他工艺加热单元,通过调节输出功率,实现温度的精确控制和稳定的热管理,是半导体工艺中温控精度的重要保证。
二、主要产品特点
高精度功率调节
支持对加热元件的电流或功率进行精确调节,实现温度快速上升和稳定维持,确保工艺一致性。多通道控制
可控制多个加热器通道,每个通道独立驱动和监控,适应复杂工艺腔体的多区域加热需求。快速响应与稳定性
集成高速反馈控制系统,可实时调整功率输出,响应温度变化,保持工艺温度稳定。安全保护功能
具备过流、过压、短路及温度超限保护,确保加热系统及设备安全,防止元件损坏。工业级高可靠设计
采用高品质功率半导体器件及散热设计,具备抗振动、耐高温、耐湿性能,适应半导体制造环境。模块化结构
标准化接口和模块化布局,便于安装、维护和快速更换,减少设备停机时间。系统兼容性强
可与 AMAT 控制器模块、温控模块及主控系统无缝对接,实现精确温度管理和工艺控制。监测与诊断功能
支持通道状态监控与故障报警,提供实时反馈,便于运维和工艺优化。
AMAT Applied Materials 0190-35176加热器驱动 英文介绍
AMAT Applied Materials 0190-35176 Heater Driver Product Features
1、 Product Overview
The AMAT 0190-35176 heater driver is a core module used in Applied Materials semiconductor equipment to control the power of heating elements.
It is mainly used in the chamber heating system, substrate heater, or other process heating units of equipment. By adjusting the output power, it achieves precise temperature control and stable thermal management, which is an important guarantee for temperature control accuracy in semiconductor processes.
2、 Main product features
High precision power regulation
Support precise adjustment of the current or power of heating elements to achieve rapid temperature rise and stable maintenance, ensuring process consistency.
Multi channel control
Multiple heater channels can be controlled, with each channel independently driven and monitored to meet the multi zone heating needs of complex process chambers.
Fast response and stability
Integrated high-speed feedback control system, which can adjust power output in real time, respond to temperature changes, and maintain stable process temperature.
Security protection function
Equipped with overcurrent, overvoltage, short circuit, and temperature over limit protection to ensure the safety of heating systems and equipment and prevent component damage.
Industrial grade high reliability design
Adopting high-quality power semiconductor devices and heat dissipation design, it has anti vibration, high temperature resistance, and moisture resistance, and is suitable for semiconductor manufacturing environments.
Modular structure
Standardized interfaces and modular layouts facilitate installation, maintenance, and quick replacement, reducing equipment downtime.
High compatibility
It can seamlessly integrate with AMAT controller modules, temperature control modules, and main control systems to achieve precise temperature management and process control.
Monitoring and diagnostic functions
Support channel status monitoring and fault alarm, provide real-time feedback, facilitate operation and process optimization.
AMAT Applied Materials 0190-35176加热器驱动 产品展示
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SSA-T8028-0652 switches
MVME2434 Channel isolation card
PACIFIC SCIENTIFIC 33VM52-000-29 module
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AMAT 0100-09071 | AMAT 0190-70044 | AMAT 0190-18322 |
AMAT 0100-09117 | AMAT 0190-70060 | AMAT 0190-18327 |
AMAT 0100-09011 | AMAT 0190-70066 | AMAT 0190-18328 |
AMAT 0100-09380 | AMAT 0190-70076 | AMAT 0190-18329 |
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