AMAT Applied Materials 3870-02612阀门组件 PDF资料
1.产 品 资 料 介 绍：
AMAT Applied Materials 3870-02612 阀门组件 产品特点
一、产品概述
AMAT 3870-02612 阀门组件是 Applied Materials 半导体设备气体输送系统中的核心执行部件。
它主要用于控制气体流量、开关及混合，实现对工艺腔体、气体面板或真空系统的精确气动管理。
该组件与设备控制系统配合工作，可实现自动化工艺控制，并确保半导体制造过程中的气体精度和稳定性。
二、主要产品特点
高精度气流控制
阀门组件能够实现对气体通断的精确控制，确保工艺腔体或气路系统的气压和流量稳定，满足严格的工艺要求。多通道设计
支持多路气体通道控制，每个通道独立驱动和监测，提高系统灵活性和工艺可控性。快速响应能力
采用高性能电磁或气动驱动机构，动作响应快，适合高频切换和精密控制场景。可靠性高
阀体及密封件采用耐腐蚀材料和工业级标准制造，确保长期使用下的密封性和稳定性。电气与气动接口兼容
集成电气控制接口，可与 AMAT 气动控制板或主控制系统直接连接，实现信号驱动与反馈监控。故障防护设计
具备过压、泄漏检测及限位保护功能，防止异常操作或系统故障引起工艺中断或设备损坏。模块化结构
标准化组件设计，便于快速安装、更换及维护，减少停机时间。工业级设计
耐高温、抗振动、抗腐蚀，适应半导体设备洁净室及高负载工况环境。
AMAT Applied Materials 3870-02612阀门组件 英文介绍
AMAT Applied Materials 3870-02612 Valve Component Product Features
1、 Product Overview
The AMAT 3870-02612 valve assembly is the core actuator component in Applied Materials semiconductor equipment gas delivery systems.
It is mainly used to control gas flow, switching, and mixing, achieving precise pneumatic management of process chambers, gas panels, or vacuum systems.
This component works in conjunction with the equipment control system to achieve automated process control and ensure gas accuracy and stability in the semiconductor manufacturing process.
2、 Main product features
High precision airflow control
Valve components can achieve precise control of gas on/off, ensuring stable gas pressure and flow in the process chamber or gas system, and meeting strict process requirements.
Multi channel design
Support multi-channel gas channel control, with each channel independently driven and monitored, improving system flexibility and process controllability.
Rapid response capability
Adopting high-performance electromagnetic or pneumatic drive mechanisms, with fast action response, suitable for high-frequency switching and precision control scenarios.
high reliability
The valve body and seals are made of corrosion-resistant materials and industrial grade standards to ensure long-term sealing and stability.
Electrical and pneumatic interface compatibility
Integrated electrical control interface, which can be directly connected to AMAT pneumatic control board or main control system to achieve signal drive and feedback monitoring.
Fault protection design
Equipped with overvoltage, leakage detection, and limit protection functions to prevent process interruption or equipment damage caused by abnormal operations or system failures.
Modular structure
Standardized component design facilitates quick installation, replacement, and maintenance, reducing downtime.
Industrial-grade design
Resistant to high temperatures, vibrations, and corrosion, suitable for semiconductor equipment cleanrooms and high load environments.
AMAT Applied Materials 3870-02612阀门组件 产品展示
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| AMAT 0100-01321 | AMAT 0190-62317 | AMAT 0190-17779 |
| AMAT 0100-00427 | AMAT 0190-63008 | AMAT 0190-17846 |
| AMAT 0100-77069 | AMAT 0190-63269 | AMAT 0190-18061 |
| AMAT 0100-20069 | AMAT 0190-63361 | AMAT 0190-18061 |
| AMAT 0100-18039 | AMAT 0190-63452 | AMAT 0190-18066 |
| AMAT 0130-01362 | AMAT 0190-63740 | AMAT 0190-18067 |
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