AMAT Applied Materials 0100-09008气动控制板 PDF资料 

1.产 品 资 料 介 绍：

AMAT Applied Materials 0100-09008 气动控制板 产品特点

一、产品概述
AMAT 0100-09008 气动控制板是 Applied Materials 半导体设备气体输送与真空控制系统中的核心组件，用于对气路系统中的阀门、执行器及真空元件进行精确控制与监测。该模块通常安装于气体面板（Gas Panel）或真空腔体控制单元中，通过电子信号实现气动动作控制，是半导体工艺系统中气流管理的重要部分。

二、主要产品特点

1. 高精度气动控制
    可精确调节气体通断与压力控制，确保工艺腔体内部气氛稳定，实现工艺一致性与重复性。

2. 多通道输出设计
    支持多路气动阀门独立控制，每路通道均具备独立驱动与反馈监测功能，提升系统灵活性。

3. 集成电气与气动接口
    电控信号与气路接口一体化布局，布线简洁、响应速度快，便于模块化维护与更换。

4. 可靠的电磁驱动技术
    采用高寿命电磁阀驱动电路，响应速度快，适合高频动作的真空与气体调节系统。

5. 高稳定性与低故障率
    采用工业级电路板及耐腐蚀材料，具备优良的抗电磁干扰和抗化学腐蚀性能，适应半导体洁净室环境。

6. 完善的监测与保护机制
    具备状态反馈、过流保护与短路保护功能，可实时监控各通道工作状态，防止系统异常。

7. 模块化结构设计
    标准化插拔式结构，可快速安装或更换，简化维护流程，减少停机时间。

8. 兼容多种气体控制系统
    可与 AMAT 的多种设备系列（如 PVD、CVD、Etch、CMP 等）配套使用，实现多工艺平台统一控制。

AMAT Applied Materials 0100-09008气动控制板 英文介绍

AMAT Applied Materials 0100-09008 Pneumatic Control Board Product Features

1、 Product Overview

The AMAT 0100-09008 pneumatic control board is a core component in the gas delivery and vacuum control system of Applied Materials semiconductor equipment, used for precise control and monitoring of valves, actuators, and vacuum components in the gas path system. This module is usually installed in a gas panel or vacuum chamber control unit, and pneumatic action control is achieved through electronic signals. It is an important part of gas flow management in semiconductor process systems.

2、 Main product features

High precision pneumatic control

Accurate adjustment of gas on/off and pressure control ensures stable atmosphere inside the process chamber, achieving process consistency and repeatability.

Multi channel output design

Supporting independent control of multiple pneumatic valves, each channel has independent driving and feedback monitoring functions, enhancing system flexibility.

Integrated electrical and pneumatic interface

The integrated layout of electronic control signals and pneumatic interfaces has simple wiring and fast response speed, making it easy to maintain and replace modularity.

Reliable electromagnetic drive technology

Adopting a long-life solenoid valve drive circuit, with fast response speed, suitable for high-frequency vacuum and gas regulation systems.

High stability and low failure rate

Using industrial grade circuit boards and corrosion-resistant materials, it has excellent resistance to electromagnetic interference and chemical corrosion, and is suitable for semiconductor cleanroom environments.

Improved monitoring and protection mechanisms

Equipped with status feedback, overcurrent protection, and short-circuit protection functions, it can monitor the working status of each channel in real time to prevent system abnormalities.

Modular structural design

Standardized plug-in structure allows for quick installation or replacement, simplifies maintenance processes, and reduces downtime.

Compatible with multiple gas control systems

It can be used in conjunction with various equipment series of AMAT, such as PVD, CVD, Etch, CMP, etc., to achieve unified control of multiple process platforms.

AMAT Applied Materials 0100-09008气动控制板 产品展示      

3.其他产品

KOLLMORGEN CB06561 PRD-B040SSLZ-62伺服驱动器
Bentley 3500/15E 164949-01振动监测模块
A30-30-10RT电子元器件

4.其他英文产品

ALSTOM AL132 Control card
ALSTOM IR139-1 Control card
ALSTOM LC105A-1 Power protection module

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：AMAT Applied Materials

型号：0100-09008气动控制板

质保：一年

成色：全新/二手

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

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