AMAT Applied Materials 0100-90271晶圆装载机联锁模块 PDF资料
1.产 品 资 料 介 绍：
一、产品概述
AMAT 0100-90271 晶圆装载机联锁模块是半导体设备中用于晶圆搬运系统安全控制的关键模块。
它主要用于 晶圆装载机（Wafer Loader） 系统中，对设备的机械动作进行联锁和状态监测，确保晶圆装载和卸载过程中设备及操作人员的安全。
该模块通过输入来自门禁、传感器和机械位置开关的信号，实现对晶圆装载动作的逻辑判断与联锁控制，防止意外操作或设备冲突。
二、产品特点
安全联锁控制
通过逻辑判断控制晶圆装载机动作，避免机械冲突或误操作；
支持多点安全信号输入（如门状态、光电传感器、限位开关）。
高可靠性工业设计
采用工业级电子元件，适应半导体制造环境的高洁净、振动和电磁干扰条件；
内部设计考虑长期连续运行的稳定性。
多通道信号管理
支持多路输入和输出信号，可同时监控多个联锁条件；
输出信号可控制主控制器或执行器（如电磁阀、驱动器等）。
模块化设计
插卡式或机架式安装，方便维护和替换；
带状态指示灯，便于故障诊断与操作状态确认。
兼容性强
与 AMAT 系列晶圆装载机控制系统、主控制器及接口模块兼容；
可作为系统安全联锁模块标准替换件。
AMAT Applied Materials 0100-90271晶圆装载机联锁模块 英文介绍
1、 Product Overview
The AMAT 0100-90271 wafer loader interlock module is a key module used for safe control of wafer handling systems in semiconductor equipment.
It is mainly used in wafer loader systems to interlock and monitor the mechanical actions of equipment, ensuring the safety of equipment and operators during wafer loading and unloading processes.
This module achieves logical judgment and interlocking control of wafer loading actions by inputting signals from access control, sensors, and mechanical position switches, preventing accidental operations or equipment conflicts.
2、 Product Features
Safety interlock control
Control the action of the wafer loader through logical judgment to avoid mechanical conflicts or misoperations;
Support multi-point safety signal input (such as door status, photoelectric sensors, limit switches).
High reliability industrial design
Adopting industrial grade electronic components to adapt to high cleanliness, vibration, and electromagnetic interference conditions in semiconductor manufacturing environments;
The internal design considers the stability of long-term continuous operation.
Multi channel signal management
Supports multiple input and output signals, and can simultaneously monitor multiple interlocking conditions;
The output signal can control the main controller or actuators (such as solenoid valves, drivers, etc.).
modular design
Plug in or rack mounted installation, convenient for maintenance and replacement;
Equipped with status indicator lights for easy fault diagnosis and operational status confirmation.
Strong compatibility
Compatible with AMAT series wafer loader control system, main controller, and interface module;
Can be used as a standard replacement for system safety interlock modules.
AMAT Applied Materials 0100-90271晶圆装载机联锁模块 产品展示
3.其他产品
DSDP140B 57160001-ACX 远程输入/输出基本单元
VMIVME-7650-83H 电源模块
TRICONEX 8305A分散型控制系统
4.其他英文产品
FBM237 RH914XS Digital module
NI SCXI-1349 Output interface card
RH924YF base module
| AMAT 0190-13175 | AMAT 0190-76273 | 5SHX2645L0004 |
| AMAT 0190-18178 | AMAT 0190-76782 | 1MRB150081R0001 |
| AMAT 0190-35800 | AMAT 0190-77015 | RDCU-12C 3AUA0000036521 |
| AMAT 0190-12085 | AMAT 0190-77016 | 3500/42-01-00 |
| AMAT 0190-22226 | AMAT 0190-77062 | 3500/22M 138607-01 |
| AMAT 0190-35190 | AMAT 0190-77106 | NDCU-21C |
| AMAT 0190-70024 | AMAT 0190-77113 | AMAT 0190-09475 |
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