AMAT Applied Materials 0100-00003步进驱动器模块 PDF资料
1.产 品 资 料 介 绍：
一、产品概述
AMAT 0100-00003 步进驱动器模块是半导体设备中用于精密运动控制的关键模块。
它主要用于控制步进电机的运行，实现高精度定位与运动控制，广泛应用于 PVD、CVD、Etch 系统中的机械臂、阀门、平移台、转台等组件。
该模块通过数字脉冲信号驱动步进电机，可实现精确的速度、方向和位置控制，是设备自动化运行不可或缺的部分。
二、产品特点
高精度步进控制
支持微步驱动，提供细分步进控制，提高定位精度；
具备速度和加速度调节功能，保证运动平稳性。
兼容性强
可与 AMAT 系列控制器及接口模块配合使用；
支持标准脉冲输入信号，适应多种步进电机型号。
工业级可靠性
模块设计考虑高温、振动及电磁干扰环境；
内部电路采用保护措施，增强长期运行稳定性。
保护功能完善
内置过流、过压、短路及过热保护；
在异常情况下自动停止驱动，保障电机及设备安全。
模块化设计
插卡式或机架式安装，便于维护和更换；
提供状态指示灯，可快速诊断驱动状态和故障。
动态响应快速
高速脉冲响应，能够满足快速启动和停止要求；
保证运动控制精度和工艺稳定性。
AMAT Applied Materials 0100-00003步进驱动器模块 英文介绍
1、 Product Overview
The AMAT 0100-00003 stepper driver module is a key module used for precision motion control in semiconductor equipment.
It is mainly used to control the operation of stepper motors, achieve high-precision positioning and motion control, and is widely used in components such as robotic arms, valves, translation stages, and turntables in PVD, CVD, and Etch systems.
This module drives the stepper motor through digital pulse signals, which can achieve precise speed, direction, and position control, and is an indispensable part of equipment automation operation.
2、 Product Features
High precision step control
Support micro step driving, provide segmented step control, and improve positioning accuracy;
Equipped with speed and acceleration adjustment functions to ensure smooth movement.
Strong compatibility
Can be used in conjunction with AMAT series controllers and interface modules;
Supports standard pulse input signals and adapts to various types of stepper motors.
Industrial grade reliability
Module design considers high temperature, vibration, and electromagnetic interference environments;
The internal circuit adopts protective measures to enhance long-term operational stability.
Complete protection function
Built in overcurrent, overvoltage, short circuit, and overheating protection;
Automatically stop driving in abnormal situations to ensure the safety of motors and equipment.
modular design
Plug in or rack mounted installation, easy to maintain and replace;
Provide status indicator lights to quickly diagnose drive status and faults.
Fast dynamic response
High speed pulse response, able to meet the requirements of fast start and stop;
Ensure motion control accuracy and process stability.
AMAT Applied Materials 0100-00003步进驱动器模块 产品展示
3.其他产品
UFC762AE101 3BHE006412R0101伺服驱动模块
DSDP140B 57160001-ACX 远程输入/输出基本单元
VMIVME-7650-83H 电源模块
4.其他英文产品
FBM237 RH914XS Digital module
NI SCXI-1349 Output interface card
RH924YF base module
| AMAT 0190-13175 | AMAT 0190-76273 | 5SHX2645L0004 |
| AMAT 0190-18178 | AMAT 0190-76782 | 1MRB150081R0001 |
| AMAT 0190-35800 | AMAT 0190-77015 | RDCU-12C 3AUA0000036521 |
| AMAT 0190-12085 | AMAT 0190-77016 | 3500/42-01-00 |
| AMAT 0190-22226 | AMAT 0190-77062 | 3500/22M 138607-01 |
| AMAT 0190-35190 | AMAT 0190-77106 | NDCU-21C |
| AMAT 0190-70024 | AMAT 0190-77113 | AMAT 0190-09475 |
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