AMAT Applied Materials 0100-76042操作控制面板 PDF资料
1.产 品 资 料 介 绍:
一、产品概述
AMAT 0100-76042 操作控制面板是半导体设备中用于人机交互的关键界面组件。
它提供操作员对设备运行状态的监控、控制及参数设置功能,广泛应用于 PVD、CVD、Etch 等工艺系统中。
该面板通常集成指示灯、开关、按钮、旋钮以及液晶或LED显示模块,确保操作直观、响应快速。
二、产品特点
直观的人机界面
提供状态指示灯、报警指示、操作按钮和旋钮,便于操作员实时控制设备。
显示关键工艺参数(如温度、压力、电压等),支持快速读取。
高可靠性工业设计
使用工业级开关、指示灯和显示器件,适应高洁净、真空或半真空工艺环境。
设计耐高温、抗振动、抗电磁干扰。
模块化结构
面板可独立拆卸或替换,维护便捷。
支持与 AMAT 系列控制器、接口模块、I/O模块无缝连接。
操作安全性
具备急停按钮和锁定功能,确保操作安全。
内置报警指示及错误提示功能,便于快速排查问题。
兼容性强
可兼容 AMAT 多款 PVD/CVD/Etch 系统的控制逻辑和电气接口。
支持标准工业通信接口与信号接入。
AMAT Applied Materials 0100-76042操作控制面板 英文介绍
1、 Product Overview
The AMAT 0100-76042 operation control panel is a key interface component used for human-computer interaction in semiconductor equipment.
It provides operators with monitoring, control, and parameter setting functions for equipment operation status, and is widely used in PVD, CVD, Etch and other process systems.
This panel typically integrates indicator lights, switches, buttons, knobs, and LCD or LED display modules to ensure intuitive operation and fast response.
2、 Product Features
Intuitive human-machine interface
Provide status indicator lights, alarm indicators, operation buttons, and knobs for operators to control the equipment in real-time.
Display key process parameters (such as temperature, pressure, voltage, etc.) and support quick reading.
High reliability industrial design
Use industrial grade switches, indicator lights, and display devices to adapt to high cleanliness, vacuum, or semi vacuum process environments.
Design high temperature resistance, vibration resistance, and electromagnetic interference resistance.
Modular structure
The panel can be independently disassembled or replaced, making maintenance convenient.
Support seamless connection with AMAT series controllers, interface modules, and I/O modules.
Operational safety
Equipped with an emergency stop button and locking function to ensure safe operation.
Built in alarm indication and error prompt function, easy to quickly troubleshoot problems.
Strong compatibility
Compatible with AMAT's control logic and electrical interfaces for multiple PVD/CVD/Etch systems.
Support standard industrial communication interfaces and signal access.
AMAT Applied Materials 0100-76042操作控制面板 产品展示
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