AMAT Applied Materials 0190-16633磁铁驱动器 PDF资料 

1.产 品 资 料 介 绍：

一、产品概述

AMAT 0190-16633 磁铁驱动器（Magnet Driver Module） 是 AMAT（Applied Materials）半导体设备中用于磁场控制系统的高精度电源驱动模块。
该模块的主要功能是为真空腔体或沉积系统中的电磁线圈（Magnet Coil）提供稳定的直流驱动电流，从而控制磁场强度与分布，改善沉积或刻蚀过程的等离子体均匀性与离子密度分布。

它通常应用于 PVD（物理气相沉积）系统、CVD 系统、Etch 等离子体反应腔体 等设备，是控制磁场均匀性与等离子体形态的核心电子组件之一。

二、产品特点

1. 高精度磁场控制

• 输出电流线性度极高，可实现对磁场强度的精准调节；

• 支持恒流模式（Constant Current Mode），保证磁场稳定不漂移；

• 适合多区域独立磁控配置（上磁场、下磁场、环形磁场等）。

2. 低噪声、低纹波输出

• 采用高效线性稳流电路与滤波设计，磁场变化极为平滑；

• 输出电流纹波典型值低于 0.5%，减少等离子体抖动。

3. 快速动态响应

• 内部控制电路具有高速反馈环路，可迅速响应系统磁场调整信号；

• 提升腔体内离子密度与工艺速率的瞬态控制性能。

4. 完善的保护机制

• 具备过流（OCP）、过压（OVP）、过温（OTP）保护；

• 支持磁线圈开路 / 短路检测与自动关断；

• 内置状态指示与报警输出接口，便于主控系统监测。

5. 模块化结构设计

• 独立可插拔模块，安装与更换方便；

• 与 AMAT 主电源架构兼容，便于系统扩展与维护。

6. 高可靠性工业级设计

• 使用高耐压功率MOSFET或IGBT组件，支持长时间连续输出；

• 内部热传导路径优化，具备高效风冷或底板散热结构；

• 适应洁净室与真空工艺环境。

7. 智能控制与监测接口

• 提供模拟控制信号接口（0–10V / 4–20mA）；

• 输出电流、电压、温度状态信号实时反馈；

• 可与系统主控或RF控制单元实现闭环调节。

AMAT Applied Materials 0190-25423直流电源模块 英文介绍

1、 Product Overview

AMAT 0190-16633 Magnet Driver Module is a high-precision power driver module used for magnetic field control systems in AMAT (Applied Materials) semiconductor equipment.

The main function of this module is to provide stable DC driving current for electromagnetic coils (Magnet Coil) in vacuum chambers or deposition systems, thereby controlling the magnetic field strength and distribution, improving the plasma uniformity and ion density distribution during deposition or etching processes.

It is commonly used in PVD (Physical Vapor Deposition) systems, CVD systems, Etch plasma reaction chambers, and other equipment, and is one of the core electronic components for controlling magnetic field uniformity and plasma morphology.

2、 Product Features

High precision magnetic field control

The output current has extremely high linearity and can achieve precise adjustment of magnetic field strength;

Support Constant Current Mode to ensure stable magnetic field without drift;

Suitable for multi area independent magnetic control configuration (upper magnetic field, lower magnetic field, circular magnetic field, etc.).

Low noise, low ripple output

Adopting efficient linear steady current circuit and filtering design, the magnetic field changes are extremely smooth;

The typical value of output current ripple is less than 0.5%, reducing plasma jitter.

Fast dynamic response

The internal control circuit has a high-speed feedback loop that can quickly respond to system magnetic field adjustment signals;

Improve the transient control performance of ion density and process rate within the cavity.

A comprehensive protection mechanism

Equipped with overcurrent (OCP), overvoltage (OVP), and over temperature (OTP) protection;

Support open/short circuit detection and automatic shutdown of magnetic coils;

Built in status indication and alarm output interface for easy monitoring by the main control system.

Modular structural design

Independent and pluggable modules, easy to install and replace;

Compatible with the AMAT main power architecture, facilitating system expansion and maintenance.

High reliability industrial grade design

Using high-voltage MOSFET or IGBT components, supporting long-term continuous output;

Internal heat conduction path optimization, with efficient air cooling or bottom plate heat dissipation structure;

Adapt to clean room and vacuum process environments.

Intelligent control and monitoring interface

Provide analog control signal interface (0-10V/4-20mA);

Real time feedback of output current, voltage, and temperature status signals;

It can achieve closed-loop regulation with the system main control or RF control unit.

AMAT Applied Materials  0190-25423直流电源模块 产品展示      

3.其他产品

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HONEYWELL TC-FPCXX2 交流电电源模块
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4.其他英文产品

VME-7807RC VME-7807RC-410000 Gas turbine module
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140ACO13000 Output module

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：AMAT Applied Materials

型号：0190-16633磁铁驱动器

质保：一年

成色：全新/二手

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