AMAT Applied Materials 0190-25423直流电源模块 PDF资料
1.产 品 资 料 介 绍:
一、产品概述
AMAT Applied Materials 0190-25423 直流电源模块是一款专为半导体制造设备设计的高性能 DC 电源单元。
它用于为等离子体电源、真空加热系统、气体控制面板及腔体控制器提供稳定的直流电源输出,是 AMAT 系统中关键的能量转换部件之一。
该模块通常安装于 PVD(物理气相沉积)、CVD(化学气相沉积)、Etch(刻蚀) 等主电源机架中,具备高稳定性、低纹波及完备的电气保护功能,确保半导体工艺中高精度电流与电压控制。
二、技术参数
项目 | 参数说明 |
---|---|
产品型号 | 0190-25423 |
产品类型 | DC Power Supply Module(直流电源模块) |
输入电压 | AC 200–240 V,单相或三相,50/60 Hz |
输出电压范围 | DC 0–48 V(典型),可调节 |
输出电流范围 | 0–20 A(视配置不同而定) |
额定功率 | 800–1000 W(典型值) |
电压调整率 | ≤ 0.5% |
电流调整率 | ≤ 1% |
输出纹波与噪声 | ≤ 50 mVp-p |
保护功能 | 过流保护(OCP)、过压保护(OVP)、过温保护(OTP)、短路保护 |
冷却方式 | 强制风冷,带内部散热风扇 |
接口形式 | 背板插槽连接 / 前端信号控制接口 |
指示与监控 | LED 状态显示,电压/电流监测信号输出 |
工作温度 | 0°C ~ 50°C |
典型尺寸 | 3U 模块化机架尺寸(约 130×220×350 mm) |
重量 | 约 5–7 kg(含散热组件) |
AMAT Applied Materials 0190-25423直流电源模块 英文介绍
1、 Product Overview
AMAT Applied Materials 0190-25423 DC Power Module is a high-performance DC power unit designed specifically for semiconductor manufacturing equipment.
It is used to provide stable DC power output for plasma power supplies, vacuum heating systems, gas control panels, and chamber controllers, and is one of the key energy conversion components in AMAT systems.
This module is usually installed in main power supply racks such as PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition), Etch (Etch), etc. It has high stability, low ripple and complete electrical protection functions, ensuring high-precision current and voltage control in semiconductor processes.
2、 Technical parameters
Project parameter description
Product model 0190-25423
Product type: DC Power Supply Module
Input voltage AC 200-240 V, single-phase or three-phase, 50/60 Hz
Output voltage range DC 0-48 V (typical), adjustable
Output current range 0-20 A (depending on configuration)
Rated power 800-1000 W (typical value)
Voltage regulation rate ≤ 0.5%
Current regulation rate ≤ 1%
Output ripple and noise ≤ 50 mVp-p
Protection functions include overcurrent protection (OCP), overvoltage protection (OVP), over temperature protection (OTP), and short circuit protection
Cooling method: forced air cooling with internal cooling fan
Interface form: Backboard slot connection/Front end signal control interface
Indication and monitoring LED status display, voltage/current monitoring signal output
Working temperature: 0 ° C to 50 ° C
Typical size 3U modular rack size (approximately 130 × 220 × 350 mm)
Weight approximately 5-7 kg (including heat dissipation components)
AMAT Applied Materials 0190-25423直流电源模块 产品展示
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