AMAT Applied Materials 0680-01169加热器 PDF资料
1.产 品 资 料 介 绍：
一、产品概述
AMAT Applied Materials 0680-01169 加热器是一款专为半导体设备真空腔体及工艺部件提供热能的电加热组件。
该加热器通常用于 CVD、PVD、Etch（刻蚀） 等设备中，主要用于维持腔体、基座或工艺气体的恒温状态，以确保工艺精度与沉积均匀性。
其结构集成了加热电阻元件与温度传感保护装置（Thermistor 或 Thermal Sensor），能实现快速加热与精确温控。
二、技术参数
| 项目 | 参数说明 |
|---|---|
| 产品型号 | 0680-01169 |
| 产品类型 | Heater Assembly（加热器组件） |
| 功能 | 加热与温度检测 |
| 额定电压 | AC 240 V（三相） |
| 额定电流 | 15 A |
| 频率 | 50 / 60 Hz |
| 结构形式 | 集成型加热板或环形加热组件 |
| 发热元件 | 电阻丝 / 陶瓷加热芯（高温型） |
| 监测方式 | 内置热敏电阻（Thermistor）或热电偶接口 |
| 温控范围 | 常温 – 400 °C（典型工艺温区） |
| 材料特性 | 高纯铝合金或陶瓷基板，具备真空兼容性 |
| 安装方式 | 法兰或支架固定，带快速插接端口 |
| 适用环境 | 真空工艺腔体、气体输送面板、晶圆传输平台等 |
AMAT Applied Materials 0680-01169加热器 英文介绍
1、 Product Overview
AMAT Applied Materials 0680-01169 heater is an electric heating component designed to provide thermal energy for semiconductor equipment vacuum chambers and process components.
This heater is commonly used in equipment such as CVD, PVD, Etch (etching), etc. It is mainly used to maintain a constant temperature state of the chamber, base, or process gas to ensure process accuracy and deposition uniformity.
Its structure integrates heating resistor elements and temperature sensing protection devices (Thermistor or Thermal Sensor), which can achieve rapid heating and precise temperature control.
2、 Technical parameters
Project parameter description
Product model 0680-01169
Product Type: Heater Assembly
Functional heating and temperature detection
Rated voltage AC 240 V (three-phase)
Rated current 15 A
Frequency 50/60 Hz
Integrated heating plate or annular heating component in structural form
Heating element resistance wire/ceramic heating core (high temperature type)
Monitoring method with built-in thermistor or thermocouple interface
Temperature control range: normal temperature -400 ° C (typical process temperature zone)
Material characteristics: high-purity aluminum alloy or ceramic substrate, with vacuum compatibility
Installation method: fixed with flange or bracket, with quick plug port
Applicable environments include vacuum process chambers, gas transport panels, wafer transport platforms, etc
AMAT Applied Materials 0680-01169加热器 产品展示
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