AMAT Applied Materials 0100-76088中心查找器模块 PDF资料
1.产 品 资 料 介 绍：
产品概述
AMAT 0100-76088 中心查找器模块是半导体设备中用于 精确定位、对准和校准工艺腔体或机械组件 的关键模块。它通过光学、电气或机械传感技术，检测和校正设备内部关键部件的中心位置，从而保证半导体工艺的高精度和稳定性。
产品特点
高精度定位能力
能实现微米级甚至亚微米级位置检测与调整。
确保工艺腔体或机械组件在加工过程中的精确对准。
多种传感技术支持
可能集成光学、激光或机械触点传感器，实现快速、准确的中心检测。
提供实时位置反馈给设备控制系统。
快速响应与自动校准
支持自动中心校正功能，减少人工调节。
响应速度快，适用于高速自动化半导体设备。
模块化设计
标准化接口，便于安装、拆卸和维护。
可与 AMAT 主控制器、I/O 模块及定位系统协同工作。
可靠性与稳定性
工业级设计，适应洁净室、真空和高温工艺环境。
长寿命传感元件和稳固结构，保证长期运行稳定。
安全与保护功能
内置过压、过流和传感器保护功能，防止异常状态损坏模块或设备。
AMAT Applied Materials 0100-76088中心查找器模块 英文介绍
Product Overview
The AMAT 0100-76088 center finder module is a key module in semiconductor equipment used for precise positioning, alignment and calibration of process chambers or mechanical components. It detects and corrects the center positions of key components inside the equipment through optical, electrical or mechanical sensing technologies, thereby ensuring the high precision and stability of semiconductor processes.
Product features
High-precision positioning capability
It can achieve position detection and adjustment at the micrometer level or even sub-micrometer level.
Ensure the precise alignment of the process cavity or mechanical components during the processing.
Supported by multiple sensing technologies
It may integrate optical, laser or mechanical contact sensors to achieve rapid and accurate center detection.
Provide real-time position feedback to the device control system.
Fast response and automatic calibration
Supports automatic center correction function to reduce manual adjustment.
It features a fast response speed and is suitable for high-speed automated semiconductor equipment.
Modular design
Standardized interfaces facilitate installation, disassembly and maintenance.
It can work in coordination with the AMAT main controller, I/O module and positioning system.
Reliability and stability
Industrial-grade design, suitable for cleanroom, vacuum and high-temperature process environments.
Long-life sensing elements and a stable structure ensure long-term stable operation.
Safety and protection functions
It is equipped with built-in overvoltage, overcurrent and sensor protection functions to prevent abnormal conditions from damaging the module or equipment.
AMAT Applied Materials 0100-76088中心查找器模块 产品展示
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| SC753A-005-01 | AMAT 0100-35180 | PFCL 201CE-10.0KN |
| SC753A-001-02 | AMAT 0100-14004 | 575 0001-ER DSTC190 ABB |
| SC753A-001-01 | AMAT 0100-35066 | 57160001-NF DSDO115 ABB |
| SC752B-001-01 | AMAT 0100-35117 | 26390582-CR DSTK132 ABB |
| SC752A-001-02 | AMAT 0100-00454 | 57520001-EV DSCS140 ABB |
| SC726A-001-PM2009 | AMAT 0100-01-252 | PFEA 113-65.3PXV |
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