AMAT Applied Materials 0040-07198安装电机 PDF资料
1.产 品 资 料 介 绍:
产品概述
AMAT 0040-07198 安装电机是半导体设备中用于驱动阀门、执行器或其他机械部件的精密电机。它通常用于控制气体流量、移动机械臂或调节装置位置,是设备自动化和精确控制的重要执行单元。该电机设计兼顾高精度、可靠性和长期运行稳定性,适用于半导体工艺环境。
产品特点
高精度控制
支持位置、速度和角度的精确控制,确保阀门或执行器的精确动作。
适合对工艺步骤要求高重复精度的应用场景。
兼容多种驱动模式
可与步进控制、伺服控制或闭环控制系统配合使用。
支持多种电气接口与控制信号输入方式。
紧凑设计与易安装
模块化结构,尺寸紧凑,便于集成在设备有限空间内。
配备标准安装接口,方便快速装配或更换。
高可靠性与工业适应性
工业级电机设计,可在半导体设备中洁净室、真空或高温环境下稳定运行。
长寿命轴承和耐磨材料,保证持续使用。
低噪声与低振动
优化机械结构和电机控制算法,减少运行噪声和振动,避免影响精密工艺。
安全保护功能
支持过流、过压和过热保护,避免电机或被驱动机械损坏。
可与控制系统联动实现异常状态报警或紧急停机功能。
AMAT Applied Materials 0040-07198安装电机 英文介绍
Product Overview
The AMAT 0040-07198 installation motor is a precision motor used in semiconductor equipment to drive valves, actuators or other mechanical components. It is typically used to control gas flow, move mechanical arms or adjust the position of devices, and is an important executive unit for equipment automation and precise control. This motor is designed with high precision, reliability and long-term operational stability in mind, and is suitable for semiconductor process environments.
Product features
High-precision control
Support precise control of position, speed and Angle to ensure the accurate operation of valves or actuators.
It is suitable for application scenarios where high repeatability accuracy is required for process steps.
Compatible with multiple drive modes
It can be used in conjunction with stepper control, servo control or closed-loop control systems.
Supports multiple electrical interfaces and control signal input methods.
Compact design and easy installation
Modular structure, compact size, easy to integrate into the limited space of the equipment.
It is equipped with standard installation interfaces for convenient and quick assembly or replacement.
High reliability and industrial adaptability
Industrial-grade motor design enables stable operation in semiconductor equipment, clean rooms, vacuum or high-temperature environments.
Long-life bearings and wear-resistant materials ensure continuous use.
Low noise and low vibration
Optimize the mechanical structure and motor control algorithm to reduce operating noise and vibration and avoid affecting the precision process.
Safety protection function
Supports overcurrent, overvoltage and overheat protection to prevent damage to the motor or the driven machinery.
It can be linked with the control system to achieve abnormal state alarm or emergency shutdown functions.
AMAT Applied Materials 0040-07198安装电机 产品展示
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