AMAT Applied Materials 0090-09102阀门控制器 PDF资料
1.产 品 资 料 介 绍：
产品概述
AMAT 0090-09102 阀门控制器是 Applied Materials 半导体设备中用于气体或流体控制系统的关键模块。它负责对阀门执行元件进行精确控制，实现工艺腔体或管路中的气体流量、压力及开关状态管理。该控制器通常与气体分配系统（GDS）、真空系统或工艺控制模块联动，保障设备安全和工艺稳定性。
产品特点
精确阀门控制
支持对电磁阀或气动阀的开关、开度或流量进行精确控制。
可实现快速响应和高重复精度，保证工艺稳定性。
数字与模拟接口兼容
具有数字控制接口，可接收来自主控制器的开/关信号。
支持模拟信号输入，实现比例控制或调节型阀门操作。
状态反馈功能
提供阀门状态反馈（开/关位置、故障状态），用于监控和自动化控制。
可连接到设备控制系统，实现闭环控制或报警功能。
安全与保护设计
内置过流、过压及过温保护，防止阀门或控制器损坏。
支持锁定功能，防止误操作导致工艺异常。
模块化与易维护
标准化模块设计，便于安装、替换和维护。
与 AMAT 其他控制模块兼容，便于集成到设备气路控制系统。
可靠性高
工业级设计，适应半导体设备中真空、洁净室和高可靠性要求。
长寿命电子元件和稳健控制电路，确保长期稳定运行。
AMAT Applied Materials 0090-09102阀门控制器 英文介绍
Product Overview
The AMAT 0090-09102 valve controller is a key module for gas or fluid control systems in Applied Materials semiconductor equipment. It is responsible for precisely controlling the valve actuator to manage the gas flow, pressure and on-off status in the process chamber or pipeline. This controller is usually linked with a gas distribution system (GDS), vacuum system or process control module to ensure equipment safety and process stability.
Product features
Precise valve control
Supports precise control of the opening, opening degree or flow rate of solenoid valves or pneumatic valves.
It can achieve rapid response and high repeatability accuracy, ensuring process stability.
Compatible with digital and analog interfaces
It is equipped with a digital control interface and can receive on/off signals from the autonomous controller.
Supports analog signal input to achieve proportional control or regulating valve operation.
Status feedback function
Provide valve status feedback (open/closed position, fault status) for monitoring and automatic control.
It can be connected to the equipment control system to achieve closed-loop control or alarm functions.
Safety and protection design
It is equipped with built-in overcurrent, overvoltage and over-temperature protection to prevent damage to valves or controllers.
Supports locking function to prevent process abnormalities caused by misoperation.
Modular and easy to maintain
Standardized module design makes installation, replacement and maintenance convenient.
Compatible with other control modules of AMAT, it is convenient to integrate into the equipment's airway control system.
High reliability
Industrial-grade design, suitable for vacuum, cleanroom and high reliability requirements in semiconductor equipment.
Long-life electronic components and robust control circuits ensure long-term stable operation.
AMAT Applied Materials 0090-09102阀门控制器 产品展示
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| SR3640-8354-7-56C | AMAT 0100-00086 | 57310001-CC DSPC171 ABB |
| SR3640-8293-7-56HC | AMAT 0100-00109 | PFCL 201CE-50.0KN |
| SR3640-8293-7-13-48BC | AMAT 0100-00941 | 57310001-KN/2 DSTC175 ABB |
| SR3640-8063-7-56HC | AMAT 0100-00046 | 57310255-AV DSRF180A ABB |
| SR3640-773-48C | 531X302DCIBAG1 | 57310001-CX DSPC155 ABB |
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