AMAT Applied Materials 0190-42550匹配网络模块 PDF资料
1.产 品 资 料 介 绍:
产品概述
AMAT 0190-42550 匹配网络模块是半导体制造设备中用于射频(RF)系统的关键组件,其主要功能是实现射频功率源与负载之间的阻抗匹配,保证高效率功率传输,并保护射频功率源。该模块通常集成在 CVD、PVD、刻蚀(ETCH)等工艺设备的射频供电系统中。
产品特点
高效射频阻抗匹配
可在射频电源与工艺腔体负载之间实现精确阻抗匹配,提高功率传输效率。
支持动态匹配,可根据负载变化自动调整,保证工艺稳定性。
宽频率工作范围
适用于常见工业射频频率(通常在几十 kHz 至 MHz 范围),可满足不同半导体工艺需求。
高功率处理能力
模块设计可承受高功率射频输入,保证在大功率工艺条件下稳定工作。
内部采用高耐压元件和低损耗线圈,确保可靠性。
低反射、低损耗设计
优化的电路和元件布局可减少射频反射和能量损耗,保护功率源,提升工艺一致性。
保护与可靠性
内部具备过压、过流、过温保护功能,可防止异常工况损坏模块或功率源。
采用高耐久性元件,适合长时间连续运行。
紧凑模块化设计
模块化、标准化接口,便于快速安装、替换或维护。
占用空间小,便于集成在设备控制柜或腔体射频系统中。
工艺兼容性强
可适配多型号 AMAT 半导体设备,包括沉积(CVD/ALD)、刻蚀(ETCH)、金属沉积等。
支持多种工艺负载特性,保证射频功率稳定输出。
AMAT Applied Materials 0190-42550匹配网络模块 英文介绍
Product Overview
The AMAT 0190-42550 matching network module is a key component for RF systems in semiconductor manufacturing equipment. Its main function is to achieve impedance matching between the RF power source and the load, ensure high-efficiency power transmission, and protect the RF power source. This module is usually integrated into the radio frequency power supply system of process equipment such as CVD, PVD, and etching (ETCH).
Product features
High-efficiency RF impedance matching
Precise impedance matching can be achieved between the RF power supply and the load in the process cavity, improving the power transmission efficiency.
Supports dynamic matching and can automatically adjust according to load changes to ensure process stability.
Wide frequency operating range
It is applicable to common industrial radio frequency (typically in the range of tens of kHz to MHz) and can meet the requirements of different semiconductor processes.
High power processing capacity
The module design can withstand high-power RF input, ensuring stable operation under high-power process conditions.
The interior adopts high-voltage resistant components and low-loss coils to ensure reliability.
Low reflection and low loss design
Optimized circuit and component layout can reduce RF reflection and energy loss, protect power sources, and enhance process consistency.
Protection and Reliability
It is equipped with overvoltage, overcurrent and over-temperature protection functions internally, which can prevent abnormal working conditions from damaging the module or power source.
It adopts high-durability components and is suitable for long-term continuous operation.
Compact modular design
Modular and standardized interfaces facilitate quick installation, replacement or maintenance.
It takes up little space and is easy to integrate into equipment control cabinets or cavity RF systems.
Strong process compatibility
It is compatible with multiple types of AMAT semiconductor equipment, including deposition (CVD/ALD), etching (ETCH), metal deposition, etc.
Supports multiple process load characteristics to ensure stable output of RF power.
AMAT Applied Materials 0190-42550匹配网络模块 产品展示
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SR469-P5-LO-A20-E | SC452-044-05 | SC903-020-01 |
SR469-P5-LO-A20 | AMAT 0100-09050 | SC903TN-001-01 |
SR469-P5-HI-A20-T | AMAT 0100-00689 | PFEA 113, IP 65 |
SR469-P5-HI-A20-E-H | AMAT 0100-A0491 | PFCL 301E-0.2 |
SR469-P5-HI-A20-E | AMAT 0100-13025 | DSRC 113 ABB |
SR469-P5-HI-A20 | AMAT 0100-76109 | PFCL 301E-1.0KN |
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