AMAT Applied Materials 3870-02656阀门锁定组件 PDF资料
1.产 品 资 料 介 绍：
一、产品概述
AMAT 3870-02656 阀门锁定组件是 Applied Materials（应用材料公司）在其半导体设备中使用的一种 流体控制与安全防护部件。该组件主要用于气体或真空系统中，对流体通道进行锁定、切换或安全隔离。
其“Lockout” 功能意味着阀门在特定状态下可通过机械方式锁定，防止误操作或未经授权的启用，常见于设备检修、维护或工艺安全保护环节。
二、结构与技术特点
三通设计（3-Way）
具有三个流体通道，可用于气体或真空流的切换与分配。
常用于在“工作状态”和“维护状态”之间快速切换管路。
直通软管接口（Barb Straight）
接口类型为直通式软管接头（Barb 型），方便软管快速插接。
无需额外螺纹或法兰连接，便于维护与更换。
机械锁定结构
内置机械锁扣或可插入锁销的机构，使阀门可锁定在“开启”或“关闭”状态。
防止在高压或危险气体环境中出现误开启。
高洁净材料设计
阀体通常采用不锈钢或高强度合金材质，具有耐腐蚀、抗氧化性能。
密封部件可能使用氟橡胶（Viton）或其他高纯度密封材料，确保在半导体工艺气体中无污染。
耐压与真空兼容性
适用于真空系统或中低压气体输送系统。
保证在真空抽气或气体加压状态下不泄漏。
高可靠性结构
适合长时间运行的半导体设备，具备高循环寿命和优良的密封保持能力。
结构紧凑、重量轻，方便在有限空间中安装。
模块化安装形式
可作为独立单元集成在 AMAT 的气体分配系统、阀岛或安全隔离模块中。
标准化设计便于快速更换与维护。
AMAT Applied Materials 3870-02656阀门锁定组件 英文介绍
1、 Product Overview
The AMAT 3870-02656 valve locking component is a fluid control and safety protection component used by Applied Materials in its semiconductor equipment. This component is mainly used in gas or vacuum systems to lock, switch, or safely isolate fluid channels.
Its' Lockout 'function means that the valve can be mechanically locked in a specific state to prevent accidental operation or unauthorized activation, which is commonly used in equipment maintenance, upkeep, or process safety protection.
2、 Structure and Technical Characteristics
Three way design (3-way)
It has three fluid channels that can be used for switching and distributing gas or vacuum flow.
Commonly used to quickly switch pipelines between "working state" and "maintenance state".
Barb Straight hose interface
The interface type is a straight through hose connector (Barb type), which facilitates quick insertion of hoses.
No additional threads or flange connections are required, making it easy to maintain and replace.
Mechanical locking structure
A mechanism with a built-in mechanical lock or insertable lock pin that allows the valve to be locked in either the "open" or "closed" position.
Prevent accidental opening in high-pressure or hazardous gas environments.
High cleanliness material design
The valve body is usually made of stainless steel or high-strength alloy material, which has corrosion resistance and oxidation resistance.
The sealing components may use Viton or other high-purity sealing materials to ensure no contamination in semiconductor process gases.
Pressure resistance and vacuum compatibility
Suitable for vacuum systems or medium low pressure gas delivery systems.
Ensure no leakage during vacuum pumping or gas pressurization.
High reliability structure
Semiconductor equipment suitable for long-term operation, with high cycle life and excellent sealing retention capability.
Compact structure, light weight, easy to install in limited space.
Modular installation form
It can be integrated as an independent unit into AMAT's gas distribution system, valve island, or safety isolation module.
Standardized design facilitates quick replacement and maintenance.
AMAT Applied Materials 3870-02656阀门锁定组件 产品展示
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| STF3648-5268-61-56BC | SC403-027-T3 | SC905-034-01 |
| STF3640-4977-61-56BC | SC403-014 | SC933-001-NN-01 |
| STF3624-5604-61-56C | SC402-024-T2 | SC933-001-01 |
| STF3624-4976-61-56BC | SC403-013-T2 | SC753A-040-08 |
| STC3720-4085-56C | SC403-013-T4 | SC90200101NNN |
| SRF5570-4986-84-5-82BC-CU | SC403-001-T1 | SC933-NN-001-01 |
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