AMAT Applied Materials 0100-90881气体面板分析 PDF资料 

1.产 品 资 料 介 绍：

AMAT Applied Materials 0100-90881 气体面板

一、产品概述

AMAT 0100-90881 是应用材料公司（Applied Materials）用于半导体设备中的 气体控制和分配模块。
其主要功能是 精确控制工艺气体的流量、压力和混合比例，为 PVD、CVD、Etch 等等离子体工艺提供稳定气体环境。

该气体面板常用于 Endura、Centura、Producer、P5000 系列设备，可集成多路气体通道，支持高精度工艺控制和安全管理。

二、产品功能

1. 气体流量控制

• 精确调节气体流量，保证工艺所需的反应气体浓度和均匀性。

• 支持低流量到高流量范围，满足不同工艺要求。

2. 压力与安全监测

• 实时监控气体压力，防止超压或泄漏。

• 内置安全阀和压力传感器，实现自动安全保护。

3. 气体混合与切换

• 可控制多路气体的混合比例，支持复杂工艺气体配比。

• 快速切换气体通道，适应不同工艺步骤。

4. 与设备控制系统集成

• 通过通信接口与主控板或 PLC 交互，实现远程监控和自动调节。

• 提供报警反馈和状态信号，便于工艺安全管理。

三、产品特点

1. 高精度气体控制

• 气体流量和压力控制精度高，保证工艺一致性。

• 支持多通道气体同步控制。

2. 安全性设计

• 内置过压保护、气体泄漏检测及紧急切断功能。

• 电气和气体管路隔离设计，降低操作风险。

3. 模块化与易维护

• 模块化气体通道设计，便于安装、拆卸和更换。

• 提供标准接口，支持快速现场维护。

4. 工业级可靠性

• 板载电子元件耐高温、耐振动，适应半导体生产环境。

• 适合连续 24/7 运行，保证气体供应稳定性。

5. 实时监控与诊断功能

• 提供气体压力、流量和阀门状态反馈。

• 支持 LED 指示或数字信号接口，便于工艺监控。

AMAT Applied Materials 0100-90881气体面板分析 英文介绍

AMAT Applied Materials 0100-90881 Gas Panel

1、 Product Overview

AMAT 0100-90881 is a gas control and distribution module used by Applied Materials for semiconductor equipment.

Its main function is to precisely control the flow rate, pressure, and mixing ratio of process gases, providing a stable gas environment for plasma processes such as PVD, CVD, and Etch.

This gas panel is commonly used in Endura, Centura, Producer, P5000 series equipment, and can integrate multiple gas channels to support high-precision process control and safety management.

2、 Product Features

Gas flow control

Accurately adjust the gas flow rate to ensure the required concentration and uniformity of the reaction gas for the process.

Support low to high flow range to meet different process requirements.

Pressure and safety monitoring

Real time monitoring of gas pressure to prevent overpressure or leakage.

Built in safety valve and pressure sensor for automatic safety protection.

Gas mixing and switching

Can control the mixing ratio of multiple gases and support complex process gas ratios.

Quickly switch gas channels to adapt to different process steps.

Integration with equipment control system

Interact with the main control board or PLC through communication interfaces to achieve remote monitoring and automatic adjustment.

Provide alarm feedback and status signals for process safety management.

3、 Product Features

High precision gas control

High precision control of gas flow rate and pressure ensures process consistency.

Support multi-channel gas synchronization control.

safety design

Built in overvoltage protection, gas leak detection, and emergency shutdown function.

Isolation design for electrical and gas pipelines to reduce operational risks.

Modular and easy to maintain

Modular gas channel design for easy installation, disassembly, and replacement.

Provide standard interfaces to support rapid on-site maintenance.

Industrial grade reliability

Onboard electronic components are resistant to high temperatures, vibrations, and suitable for semiconductor production environments.

Suitable for continuous 24/7 operation, ensuring stable gas supply.

Real time monitoring and diagnostic functions

Provide feedback on gas pressure, flow rate, and valve status.

Support LED indication or digital signal interface for process monitoring.

AMAT Applied Materials 0100-90881气体面板分析 产品展示      

3.其他产品

FOXBORO FPS400-24 P0922YU电源模块
WOODWARD 8280-423数字控制模块
3BHB040288R0001终端单元

4.其他英文产品

HIMA F3236 Input module
HIMA F6217 Input module
HIMA F6705 Output module

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：AMAT Applied Materials

型号：0100-90881气体面板分析

质保：一年

成色：全新/二手

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