AMAT Applied Materials 0100-A0019射频匹配探测器 PDF资料
1.产 品 资 料 介 绍：
AMAT Applied Materials 0100-A0019 射频匹配探测器
一、产品概述
AMAT 0100-A0019 是应用材料公司（Applied Materials）用于半导体设备中的 射频（RF）匹配探测器。
该模块的主要功能是 监测 RF 发电机与工艺腔体之间的阻抗匹配状态，通过检测反射功率和负载变化，确保射频能量高效、安全地传输至等离子体腔体。
射频匹配探测器通常与 RF 发电机（如 0090-01419）和匹配网络 配合使用，是 PVD、CVD、Etch 等等离子体工艺设备中的关键传感与控制元件。
二、产品功能
阻抗匹配监测
实时检测腔体负载阻抗和匹配网络状态。
判断发射功率是否与腔体负载匹配，避免能量反射。
反射功率检测
测量射频反射功率，防止 RF 能量反向流入发电机，保护设备。
输出信号给控制系统，实现自动匹配或报警触发。
工艺过程优化
提供匹配状态反馈，辅助 RF 发电机和匹配网络自动调整。
保证等离子体稳定性，提高工艺一致性和产能。
安全保护功能
内置过压、过流检测接口。
在反射功率过高或匹配异常时触发保护机制，防止设备损坏。
AMAT Applied Materials 0100-A0019射频匹配探测器 英文介绍
AMAT Applied Materials 0100-A0019 RF Matching Detector
1、 Product Overview
AMAT 0100-A0019 is a radio frequency (RF) matching detector used by Applied Materials for semiconductor devices.
The main function of this module is to monitor the impedance matching status between the RF generator and the process chamber, and ensure efficient and safe transmission of RF energy to the plasma chamber by detecting reflected power and load changes.
RF matching detectors are typically used in conjunction with RF generators (such as 0090-01419) and matching networks, and are key sensing and control components in plasma process equipment such as PVD, CVD, and Etch.
2、 Product Features
Impedance matching monitoring
Real time detection of cavity load impedance and matching network status.
Determine whether the transmission power matches the cavity load to avoid energy reflection.
Reflection power detection
Measure RF reflection power to prevent RF energy from flowing back into the generator and protect the equipment.
Output signals to the control system to achieve automatic matching or alarm triggering.
Process optimization
Provide matching status feedback to assist in automatic adjustment of RF generators and matching networks.
Ensure plasma stability, improve process consistency and productivity.
Security protection function
Built in overvoltage and overcurrent detection interfaces.
Trigger the protection mechanism when the reflected power is too high or the matching is abnormal to prevent equipment damage.
AMAT Applied Materials 0100-A0019射频匹配探测器 产品展示
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