AMAT Applied Materials 0010-26029电源匹配组件 PDF资料
1.产 品 资 料 介 绍：
AMAT Applied Materials 0010-26029 电源匹配组件
一、产品概述
AMAT 0010-26029 是应用材料公司（Applied Materials）用于半导体设备中的 射频电源匹配组件（RF Power Matching Network Assembly）。
该组件的主要功能是将射频（RF）电源与等离子体腔体之间的阻抗进行实时匹配，以最大化能量传输效率并稳定等离子体状态。
它通常应用在 PVD、CVD、ETCH、ALD 等真空工艺腔体中，是 AMAT 真空处理系统中不可或缺的高频功率控制模块。
二、产品特点
自动阻抗匹配功能
能够实时监测负载变化（如腔体内气体种类、等离子体密度、工艺阶段变化）并自动调整匹配网络。
实现电源到腔体的能量高效传输，减少反射功率（Reflected Power）。
高可靠性与稳定性设计
采用高耐压电容与高频电感器件，确保在高功率 RF 条件下长期运行。
具备良好的热稳定性，适应 24/7 连续生产环境。
模块化结构
模块化设计便于安装与更换，可快速维护或升级。
与 AMAT 各系列 RF 电源模块（如 ENI、AE、Comdel）兼容。
高精度匹配响应
匹配速度快（通常 < 100 毫秒），满足快速切换工艺步骤需求。
保证工艺中离子密度、能量分布的均匀性，提高薄膜沉积或刻蚀一致性。
内置安全保护电路
具备过压、过流、过热保护功能，防止因异常反射导致 RF 电源或腔体损坏。
提供反馈信号用于系统控制与状态监测。
兼容多种 AMAT 工艺平台
适用于 Endura、Centura、Producer、P5000 等系列设备。
可匹配不同功率等级（13.56 MHz、2 MHz 等频段）的 RF 电源系统。
AMAT Applied Materials 0190-00405驱动硬盘 英文介绍
AMAT Applied Materials 0010-26029 Power Matching Components
1、 Product Overview
AMAT 0010-26029 is an RF Power Matching Network Assembly used by Applied Materials for semiconductor equipment.
The main function of this component is to match the impedance between the radio frequency (RF) power supply and the plasma chamber in real-time, in order to maximize energy transfer efficiency and stabilize the plasma state.
It is commonly used in vacuum process chambers such as PVD, CVD, ETCH, ALD, and is an indispensable high-frequency power control module in AMAT vacuum processing systems.
2、 Product Features
Automatic impedance matching function
Real time monitoring of load changes (such as gas types inside the cavity, plasma density, process stage changes) and automatic adjustment of the matching network.
Realize efficient energy transfer from the power supply to the cavity and reduce reflected power.
High reliability and stability design
Using high-voltage capacitors and high-frequency inductors to ensure long-term operation under high-power RF conditions.
Has good thermal stability and is suitable for 24/7 continuous production environment.
Modular structure
Modular design facilitates installation and replacement, and can be quickly maintained or upgraded.
Compatible with AMAT's various series of RF power modules (such as ENI, AE, Comdel).
High precision matching response
Fast matching speed (usually<100 milliseconds), meeting the requirements for quick switching of process steps.
Ensure the uniformity of ion density and energy distribution in the process, and improve the consistency of film deposition or etching.
Built in safety protection circuit
Equipped with overvoltage, overcurrent, and overheating protection functions to prevent damage to the RF power supply or cavity caused by abnormal reflection.
Provide feedback signals for system control and status monitoring.
Compatible with multiple AMAT process platforms
Suitable for Endura, Centura, Producer, P5000 and other series of devices.
Can be matched with RF power systems of different power levels (13.56 MHz, 2 MHz, and other frequency bands).
AMAT Applied Materials 0190-00405驱动硬盘 产品展示
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| 710-658046-20 | 8005-DN-116 | 820-21036-001 |
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| 710-657231-20 | 8005-DMU-1 | 820-22196-002 |
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