AMAT Applied Materials 0190-24680 面板温度控制器 PDF资料
1.产 品 资 料 介 绍：
一、产品概述
AMAT Applied Materials 0190-24680 是一款 面板式温度控制器（Panel Temperature Controller），主要用于半导体设备中精确控制加热腔体、工艺腔、气体面板及其他热控区域的温度。
该控制器通常安装于设备控制面板或子系统模块中，通过热电偶（Thermocouple, TC）或 RTD（电阻温度传感器）进行温度采集，并通过 PID 控制算法实现加热功率输出调节。
在 AMAT 的 CVD、PVD、Etch、CMP 等设备平台中，0190-24680 是维持工艺稳定性的重要部件之一，确保材料沉积、刻蚀或反应过程在最优温度条件下进行。
二、技术参数
产品类型：数字式温度控制器（Digital Temperature Controller）
输入类型：K 型、J 型热电偶或 PT100/RTD 信号输入
输出方式：继电器输出 / SSR（固态继电器）驱动 / 模拟电压输出（依设备配置而定）
显示方式：LED 数码显示（设定值 SV 与实际值 PV 同时显示）
控制精度：±0.1% F.S.（典型）
调节方式：PID 自动调节（带自整定功能）
电源规格：24 VDC 或 100–240 VAC（取决于设备版本）
安装形式：面板嵌入式（标准 1/8 DIN 或 1/4 DIN 尺寸）
工作温度范围：0～50℃（控制器环境）
主要接口：前面板设定键、显示屏；后部信号输入 / 输出端子
三、产品应用领域
| 应用领域 | 具体用途与功能说明 |
|---|---|
| 半导体制造设备 | 用于控制工艺腔、气体管路、基片载台或加热板温度，保证沉积或刻蚀过程中热均匀性和稳定性。 |
| 化学气相沉积（CVD）系统 | 调节反应腔温度，以控制薄膜生长速率、成分均匀性及应力特性。 |
| 物理气相沉积（PVD）系统 | 控制溅射源、基板加热台或挡板加热器温度，确保金属或介质膜的附着与晶化质量。 |
| 刻蚀设备（Etch System） | 管理腔体壁温和电极温度，以维持气体化学反应平衡和离子能量分布稳定。 |
| 化学机械抛光（CMP）设备 | 控制浆液加热或工作台温度，避免温度波动影响抛光速率与表面平整度。 |
| 气体输送面板（Gas Panel） | 调节气体加热区温度，防止高黏度气体冷凝、维持气体流速与化学活性。 |
AMAT Applied Materials 0190-24680 面板温度控制器 英文介绍
1、 Product Overview
AMAT Applied Materials 0190-24680 is a panel temperature controller primarily used for precise temperature control of heating chambers, process chambers, gas panels, and other thermal control areas in semiconductor equipment.
This controller is usually installed in the device control panel or subsystem module, and temperature is collected through thermocouples (TC) or RTDs (resistance temperature sensors), and the heating power output is adjusted through PID control algorithm.
In AMAT's CVD, PVD, Etch, CMP and other equipment platforms, 0190-24680 is one of the important components to maintain process stability, ensuring that material deposition, etching or reaction processes are carried out under optimal temperature conditions.
2、 Technical parameters
Product type: Digital Temperature Controller
Input type: K-type, J-type thermocouple or PT100/RTD signal input
Output mode: Relay output/SSR (Solid State Relay) drive/Analog voltage output (depending on device configuration)
Display mode: LED digital display (set value SV and actual value PV are displayed simultaneously)
Control accuracy: ± 0.1% F.S. (typical)
Adjustment method: PID automatic adjustment (with self-tuning function)
Power specifications: 24 VDC or 100-240 VAC (depending on device version)
Installation form: panel embedded (standard 1/8 DIN or 1/4 DIN size)
Working temperature range: 0-50 ℃ (controller environment)
Main interfaces: front panel setting keys, display screen; Rear signal input/output terminal
3、 Product application areas
Application field specific purpose and functional description
Semiconductor manufacturing equipment is used to control the temperature of process chambers, gas pipelines, substrate stages, or heating plates, ensuring thermal uniformity and stability during deposition or etching processes.
The chemical vapor deposition (CVD) system adjusts the reaction chamber temperature to control the film growth rate, composition uniformity, and stress characteristics.
The Physical Vapor Deposition (PVD) system controls the temperature of the sputtering source, substrate heating stage, or baffle heater to ensure the adhesion and crystallization quality of the metal or dielectric film.
The Etch System manages the chamber wall temperature and electrode temperature to maintain gas chemical reaction equilibrium and stable ion energy distribution.
Chemical mechanical polishing (CMP) equipment controls the heating of the slurry or the temperature of the worktable to avoid temperature fluctuations that affect the polishing rate and surface smoothness.
The Gas Panel regulates the temperature of the gas heating zone to prevent condensation of high viscosity gases and maintain gas flow rate and chemical activity.
AMAT Applied Materials 0190-24680 面板温度控制器 产品展示
3.其他产品
Motorola MVME2400-0361 单板计算机
Woodward 8290-185速度控制器
HIMA F3226A输入模块
4.其他英文产品
ELMA 1900002919-0000R output scan module
BENTLY 3500/05-02-04-00-00-00 Monitor framework
BENTLY 3500/22M 138607-01 Monitor module
| 745-W2-P5-G5-HI-A-E-H | 8030-RIM-101 | X-FTA 009 02L |
| 745-W2-P5-G5-HI-A-E | 8030-R1M-185A | X-FTA 008 02L |
| 745-W2-P5-G5-HI-A | 8030-PV-28 | X-FTA 007 02L |
| 745-W2-P5-G5-HI | 8030-PS-70 | X-FTA 006 02L |
| 745-W2-P1-G1-LO-E | 8030-PS-51 | X-FTA 006 01L |
| 745-W2-P1-G1-HI-T-H | 8030-PS-41 | X-FTA 005 02L |
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