AMAT Applied Materials 0010-13143射频模块组件 PDF资料 

1.产 品 资 料 介 绍：

一、产品概述

AMAT Applied Materials 0010-13143 射频模块组件是一种用于半导体设备的关键射频功率控制单元。它主要负责生成、调节和传输射频功率，以支持工艺过程中等离子体生成和精密加工。该模块通常与射频匹配器、互锁模块及控制器协同工作，是设备射频系统稳定运行和工艺精度保障的重要部件。

二、技术参数（推测整理）

• 部件类型：射频模块组件（RF Module Assembly）

• 功能定位：射频功率生成、调节与控制

• 接口类型：射频接口、控制信号接口及电源接口

• 功率输出：根据不同应用提供指定射频功率（如数百瓦至千瓦级）

• 安装方式：模块化设计，可安装于射频单元或控制机箱内

• 保护功能：过流、过压、短路及过温保护

• 环境适应性：工业级设计，适应半导体洁净室及高电磁干扰环境

• 版本修订：可能存在不同版本（Rev A/B 等），在功率输出或接口类型上有所差异

三、应用场景

• 等离子体工艺支持：为半导体工艺生成所需射频功率

• 射频功率调节：与射频匹配器和互锁模块配合，实现功率精确控制

• 设备保护：在异常状态下通过互锁逻辑自动断开或报警

• 工艺数据监控：向控制器提供射频状态和性能反馈

四、产品优势

1. 高稳定射频输出：确保工艺过程稳定和一致

2. 模块化设计：便于安装、维护和替换

3. 完善保护机制：过流、过压、过温及互锁保护，保障设备安全

4. 兼容性强：与 AMAT 射频系统和工艺模块高度兼容

5. 工业级可靠性：适应半导体洁净室及高负荷运行环境

AMAT Applied Materials 0010-13143射频模块组件  英文介绍

1、 Product Overview

AMAT Applied Materials 0010-13143 RF module component is a critical RF power control unit used in semiconductor equipment. It is mainly responsible for generating, regulating, and transmitting RF power to support plasma generation and precision machining during the manufacturing process. This module usually works in conjunction with the RF matching module, interlock module, and controller, and is an important component for the stable operation and process accuracy guarantee of the equipment RF system.

2、 Technical parameters (speculated and organized)

Component type: RF Module Assembly

Functional positioning: RF power generation, regulation, and control

Interface types: RF interface, control signal interface, and power interface

Power output: Provide specified RF power (such as hundreds of watts to kilowatts) according to different applications

Installation method: Modular design, can be installed in the RF unit or control chassis

Protection function: overcurrent, overvoltage, short circuit, and over temperature protection

Environmental adaptability: Industrial grade design, suitable for semiconductor cleanrooms and high electromagnetic interference environments

Version revision: There may be different versions (Rev A/B, etc.) with differences in power output or interface types

3、 Application scenarios

Plasma process support: Generate the required RF power for semiconductor processes

RF power regulation: in conjunction with RF matching and interlocking modules, achieves precise power control

Equipment protection: Automatic disconnection or alarm through interlocking logic in abnormal states

Process data monitoring: providing RF status and performance feedback to the controller

4、 Product advantages

High stability RF output: ensuring stable and consistent process flow

Modular design: easy to install, maintain, and replace

Improve protection mechanisms: overcurrent, overvoltage, overtemperature, and interlock protection to ensure equipment safety

Strong compatibility: highly compatible with AMAT RF systems and process modules

Industrial grade reliability: suitable for semiconductor cleanrooms and high load operating environments

AMAT Applied Materials 0010-13143射频模块组件 产品展示      

3.其他产品

ICS TRIPLEX T8431C处理器模块
ICS TRIPLEX T8403C数字输入模块
ICS TRIPLEX T8151C 通信接口模块

4.其他英文产品

1C31227G01 analog output module
NI SCXI-1193 Switch mold piece
GE IS215VCMIH2CA IS200VCMIH2CAA Gas turbine module

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：AMAT Applied Materials

型号：0010-13143射频模块组件

质保：一年

成色：全新/二手

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