AMAT Applied Materials 0100-35565射频互锁模块 PDF资料 

1.产 品 资 料 介 绍：

一、产品概述

AMAT Applied Materials 0100-35565 射频互锁模块是一种用于半导体设备射频系统的安全控制模块。它主要用于监控和管理射频功率系统的安全状态，通过互锁逻辑确保射频电源在异常状态下自动断开或报警，从而保护设备及工艺安全。该模块通常与射频电源、匹配器及控制器协同工作，是射频系统安全运行的重要组成部分。

二、技术参数（推测整理）

• 部件类型：射频安全互锁模块（RF Interlock Module）

• 功能定位：射频系统互锁监控与安全保护

• 接口类型：数字输入/输出接口，用于连接射频功率模块、控制器及报警系统

• 逻辑功能：内置互锁逻辑，监控射频功率、电流和状态信号

• 安装方式：模块化设计，可安装于控制机箱或射频电源附近

• 电源要求：典型工业电源（+5V、+12V 或背板供电）

• 保护功能：具备过流、短路、异常状态检测和信号隔离

• 环境适应性：工业级设计，适应半导体洁净室及高电磁干扰环境

• 版本修订：可能存在不同版本（Rev A/B 等），在接口数量或逻辑功能上有所差异

三、应用场景

• 射频功率系统安全保护：在射频异常或故障时自动断开电源

• 工艺保护：防止在非安全状态下射频功率激活，保护设备和工艺

• 闭环控制配合：与射频匹配器及控制器协作，实现安全控制

• 报警与信号反馈：向主控系统提供射频状态和故障信息

四、产品优势

1. 高安全性：实时监控射频功率及状态，防止设备和工艺损坏

2. 模块化设计：便于安装、维护和替换

3. 智能互锁逻辑：内置射频安全逻辑，自动响应异常状态

4. 兼容性强：与 AMAT 射频系统及控制模块高度兼容

5. 工业级可靠性：适应半导体洁净室及高干扰环境

AMAT Applied Materials 0100-35565射频互锁模块 英文介绍

1、 Product Overview

AMAT Applied Materials 0100-35565 RF Interlock Module is a safety control module used in semiconductor equipment RF systems. It is mainly used to monitor and manage the safety status of RF power systems, ensuring automatic disconnection or alarm of RF power supply in abnormal states through interlocking logic, thereby protecting equipment and process safety. This module usually works in conjunction with the RF power supply, matching device, and controller, and is an important component of the safe operation of the RF system.

2、 Technical parameters (speculated and organized)

Component type: RF Interlock Module

Functional positioning: RF system interlock monitoring and security protection

Interface type: Digital input/output interface, used to connect RF power modules, controllers, and alarm systems

Logic function: Built in interlock logic, monitoring RF power, current, and status signals

Installation method: Modular design, can be installed near the control chassis or RF power supply

Power requirements: Typical industrial power supply (+5V,+12V or backplane power supply)

Protection function: equipped with overcurrent, short circuit, abnormal state detection and signal isolation

Environmental adaptability: Industrial grade design, suitable for semiconductor cleanrooms and high electromagnetic interference environments

Version revision: There may be different versions (Rev A/B, etc.) with differences in the number of interfaces or logical functions

3、 Application scenarios

RF power system safety protection: automatically disconnect power supply in case of RF abnormality or failure

Process protection: prevent RF power activation in non safe states, protect equipment and processes

Closed loop control coordination: Collaborate with RF matching devices and controllers to achieve safe control

Alarm and signal feedback: Provide RF status and fault information to the main control system

4、 Product advantages

High security: Real time monitoring of RF power and status to prevent equipment and process damage

Modular design: easy to install, maintain, and replace

Intelligent interlock logic: Built in RF safety logic, automatically responds to abnormal states

Strong compatibility: highly compatible with AMAT RF system and control module

Industrial grade reliability: suitable for semiconductor cleanrooms and high interference environments

AMAT Applied Materials 0100-35565射频互锁模块 产品展示      

3.其他产品

3BHE050077R0102 UNS0881b-PV2电源模块
TRICONEX MP3101主处理器模块
TRICONEX DI3301通信模型

4.其他英文产品

KUC711AE 3BHB004661R0001 Excitation control module
KUC711AE01 3BHB004661R0001 Excitation module
METSO PDP401 logical unit module

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品牌：AMAT Applied Materials

型号：0100-35565射频互锁模块

质保：一年

成色：全新/二手

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