AMAT Applied Materials 0100-90642等离子弧电流板 PDF资料 

1.产 品 资 料 介 绍：

一、产品概述

AMAT Applied Materials 0100-90642 等离子弧电流板是一种用于半导体设备射频或等离子体工艺系统的关键电子模块。它主要用于实时监测等离子弧的电流参数，将采集到的电流信号反馈给控制器，从而实现精确的闭环控制，保证工艺稳定性与设备安全。

二、技术参数（推测整理）

• 部件类型：电流监测模块（Current Monitoring Board）

• 功能定位：等离子弧电流检测与反馈

• 测量范围：适用于射频/等离子系统中典型电流（具体值依设备而定）

• 输出信号：模拟或数字信号反馈至主控系统

• 接口类型：板载接口或线束连接

• 安装方式：模块化设计，可安装在控制机箱或功率模块附近

• 环境适应性：工业级设计，适应半导体洁净室环境和高电磁干扰条件

• 保护功能：具备过流、短路及信号滤波保护

• 版本修订：可能存在不同版本（Rev A/B 等），在测量精度或接口上有所差异

三、应用场景

• 等离子体工艺监控：实时监控等离子弧电流，实现闭环控制

• 射频系统保护：提供异常电流报警，防止设备过载或损坏

• 工艺一致性保障：保证刻蚀、沉积或清洗工艺中的等离子体稳定

• 数据采集：向控制器提供实时电流数据，用于工艺优化与记录

AMAT Applied Materials 0100-90642等离子弧电流板 英文介绍

1、 Product Overview

AMAT Applied Materials 0100-90642 plasma arc current plate is a critical electronic module used in semiconductor equipment RF or plasma process systems. It is mainly used for real-time monitoring of the current parameters of plasma arc, and feeds back the collected current signal to the controller to achieve precise closed-loop control, ensuring process stability and equipment safety.

2、 Technical parameters (speculated and organized)

Component type: Current Monitoring Board

Functional positioning: Plasma arc current detection and feedback

Measurement range: Suitable for typical currents in RF/plasma systems (specific values depend on the equipment)

Output signal: Analog or digital signal feedback to the main control system

Interface type: onboard interface or wire harness connection

Installation method: Modular design, can be installed near the control chassis or power module

Environmental adaptability: Industrial grade design, suitable for semiconductor cleanroom environment and high electromagnetic interference conditions

Protection function: equipped with overcurrent, short circuit, and signal filtering protection

Version revision: There may be different versions (Rev A/B, etc.) with differences in measurement accuracy or interfaces

3、 Application scenarios

Plasma process monitoring: Real time monitoring of plasma arc current to achieve closed-loop control

RF system protection: Provides abnormal current alarm to prevent equipment overload or damage

Process consistency guarantee: Ensure plasma stability during etching, deposition, or cleaning processes

Data collection: Provide real-time current data to the controller for process optimization and recording

AMAT Applied Materials 0100-90642等离子弧电流板 产品展示      

3.其他产品

TRICONEX 2101处理器模块
3BHE050077R0102 UNS0881b-PV2电源模块
TRICONEX MP3101主处理器模块

4.其他英文产品

METSO IOP341 Servo module
METSO IOP345 Industrial controller
METSO IOP353 logic card

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：AMAT Applied Materials

型号：0100-90642等离子弧电流板

质保：一年

成色：全新/二手

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