AMAT Applied Materials 3020-00121气缸组件 PDF资料 

1.产 品 资 料 介 绍：

一、产品概述

AMAT Applied Materials 3020-00121 气缸组件是一种用于半导体设备的执行机构，负责实现直线或旋转运动以驱动阀门、门板、机械手臂或其他工艺部件。该组件通常集成在气动系统中，通过压缩空气控制动作，确保设备在工艺和维护过程中精确、可靠地完成机械操作。

二、技术参数（推测整理）

• 部件类型：气缸组件（Cylinder Assembly）

• 驱动方式：气动驱动，使用压缩空气作为动力源

• 行程长度：根据具体应用不同，典型为几十毫米到数百毫米

• 安装方式：模块化设计，可固定在设备机架、面板或工艺腔室

• 接口：气源接口、控制阀接口及机械连接接口

• 动作类型：单作用或双作用，可实现直线或旋转运动

• 环境适应性：工业级设计，适应半导体洁净室环境

• 版本修订：可能存在不同版本（Rev A/B 等），在行程、材料或接口上有所差异

三、应用场景

• 阀门控制：驱动气动阀门，实现气体或液体的精确调节

• 面板/门板驱动：用于机台门或检修面板的开合控制

• 工艺部件驱动：驱动机械手臂或其他工艺移动部件

• 维护操作：在检修或更换模块时提供自动化驱动，提高效率

四、产品优势

1. 高精度控制：气动驱动稳定，动作平稳可靠

2. 模块化设计：便于更换和维护，减少设备停机时间

3. 兼容性强：与 AMAT 多种机台和工艺模块配套使用

4. 耐用性高：适应半导体洁净室和高负荷工作环境

5. 安全性好：动作可控，减少误操作风险

AMAT Applied Materials 0100-71047主框架互锁模块 英文介绍

1、 Product Overview

AMAT Applied Materials 3020-00121 cylinder assembly is an actuator used in semiconductor equipment, responsible for achieving linear or rotational motion to drive valves, door panels, robotic arms, or other process components. This component is usually integrated into pneumatic systems, and its actions are controlled by compressed air to ensure precise and reliable mechanical operation of the equipment during the process and maintenance.

2、 Technical parameters (speculated and organized)

Component type: Cylinder Assembly

Drive mode: Pneumatic drive, using compressed air as the power source

Travel length: Depending on the specific application, typically ranging from tens of millimeters to hundreds of millimeters

Installation method: Modular design, can be fixed on equipment racks, panels, or process chambers

Interfaces: Air source interface, control valve interface, and mechanical connection interface

Action type: single acting or double acting, capable of achieving linear or rotational motion

Environmental adaptability: Industrial grade design, suitable for semiconductor cleanroom environment

Version revision: There may be different versions (Rev A/B, etc.) with differences in itinerary, materials, or interfaces

3、 Application scenarios

Valve control: Drive pneumatic valves to achieve precise adjustment of gases or liquids

Panel/door panel drive: used for opening and closing control of machine doors or maintenance panels

Process component drive: driving mechanical arms or other process moving parts

Maintenance operation: Provide automated driving during module maintenance or replacement to improve efficiency

4、 Product advantages

High precision control: stable pneumatic drive, smooth and reliable action

Modular design: easy to replace and maintain, reducing equipment downtime

Strong compatibility: compatible with multiple AMAT machines and process modules

High durability: Suitable for semiconductor cleanrooms and high load working environments

Good safety: controllable actions, reducing the risk of misoperation

AMAT Applied Materials 0100-71047主框架互锁模块 产品展示      

3.其他产品

TRICONEX 2401数字输出底座
TRICONEX 2351模块底座
TRICONEX 2301控制器模块

4.其他英文产品

METSO IOP111 module
METSO IOP302 Numerical control module
METSO IOP303 Numerical control module

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：AMAT Applied Materials

型号：3020-00121气缸组件

质保：一年

成色：全新/二手

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

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