AMAT Applied Materials 0100-71047主框架互锁模块 PDF资料
1.产 品 资 料 介 绍:
一、产品概述
AMAT Applied Materials 0100-71047 主框架互锁模块是一种用于半导体工艺设备的安全控制模块。它主要用于主控框架的互锁管理,通过监测和控制安全状态,确保设备在操作、维护或故障情况下能够安全运行。该模块在 AMAT 设备中负责实现电气、逻辑和机械互锁的集中管理,是设备安全运行的关键组成部分。
二、技术参数(推测整理)
功能定位:主框架安全互锁监控与控制
接口类型:数字输入/输出接口,用于与安全开关、门锁、急停按钮及其他互锁信号连接
逻辑控制:内置安全逻辑判断,实现多通道互锁状态管理
安装方式:模块化插入主控框架或控制机箱
电源要求:典型工业电源(+5V、+12V 或背板供电)
信号保护:具备过流、短路及信号滤波保护,提高系统可靠性
环境适应性:工业级设计,适合半导体洁净室环境
版本修订:可能存在不同版本(Rev A/B 等),在接口数量或逻辑功能上有所差异
三、应用场景
设备安全管理:监控机台门、面板及子系统状态,实现操作安全
互锁控制:在维修、检修或故障时防止危险动作,保护设备与操作人员
工艺保护:确保工艺过程中重要模块仅在安全状态下运行
主控框架集成:与 I/O 模块、控制器及其他安全模块协同工作
四、产品优势
高可靠安全性:集中管理互锁信号,降低误操作风险
模块化设计:可快速替换,方便维护和升级
逻辑智能化:内置安全逻辑,自动判断和响应互锁状态
兼容性强:与 AMAT 机台主控框架和其他模块高度兼容
工业级耐用性:设计适应洁净室和半导体设备高标准环境
AMAT Applied Materials 0100-71047主框架互锁模块 英文介绍
1、 Product Overview
The AMAT Applied Materials 0100-71047 main framework interlock module is a safety control module used for semiconductor process equipment. It is mainly used for interlocking management of the main control framework, ensuring the safe operation of equipment in operation, maintenance, or fault situations by monitoring and controlling the safety status. This module is responsible for centralized management of electrical, logical, and mechanical interlocks in AMAT equipment, and is a key component for the safe operation of the equipment.
2、 Technical parameters (speculated and organized)
Functional positioning: Main framework security interlock monitoring and control
Interface type: Digital input/output interface, used to connect with safety switches, door locks, emergency stop buttons, and other interlocking signals
Logic control: Built in security logic judgment, realizing multi-channel interlocking state management
Installation method: Modular insertion into the main control frame or control chassis
Power requirements: Typical industrial power supply (+5V,+12V or backplane power supply)
Signal protection: equipped with overcurrent, short circuit, and signal filtering protection to improve system reliability
Environmental adaptability: Industrial grade design, suitable for semiconductor cleanroom environment
Version revision: There may be different versions (Rev A/B, etc.) with differences in the number of interfaces or logical functions
3、 Application scenarios
Equipment safety management: Monitor the status of machine doors, panels, and subsystems to achieve operational safety
Interlock control: prevents dangerous actions during maintenance, repair, or malfunction, protecting equipment and operators
Process protection: Ensure that important modules only operate in a safe state during the process
Integration of main control framework: works in conjunction with I/O modules, controllers, and other security modules
4、 Product advantages
High reliability and security: Centralized management of interlocking signals to reduce the risk of misoperation
Modular design: can be quickly replaced, easy to maintain and upgrade
Logic intelligence: Built in security logic, automatically determines and responds to interlock status
Strong compatibility: highly compatible with AMAT machine control framework and other modules
Industrial grade durability: designed to adapt to high standard environments of clean rooms and semiconductor equipment
AMAT Applied Materials 0100-71047主框架互锁模块 产品展示
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