AMAT Applied Materials 0100-00046电流感应组件  PDF资料 

1.产 品 资 料 介 绍：

一、产品概述

AMAT Applied Materials 0100-00046 电流感应组件是一种用于半导体工艺设备电源和控制系统的关键模块，用于实时监测电流信号并将其反馈给控制单元。该组件可以检测射频电源、真空泵、执行器或其他关键子系统的电流状态，从而实现闭环控制、故障保护及工艺参数监控。

二、技术参数（推测整理）

• 功能定位：电流检测与信号反馈

• 测量范围：可覆盖设备中典型功率电流（具体数值依机型不同）

• 输出信号：模拟电压信号或数字信号反馈至主控系统

• 接口形式：板载接口或连接线束输出至控制器

• 保护功能：具备过流、短路检测功能，保障设备安全

• 安装方式：模块化设计，可安装于机箱、控制底盘或电源模块附近

• 环境适应性：工业级设计，适应半导体设备的高温、洁净室及电磁干扰环境

• 版本修订：可能存在不同版本（如 Rev A/B），在测量精度或接口方式上略有差异

三、应用场景

• 射频电源监控：检测 RF 匹配器、功率输出或负载电流，实现闭环调节

• 真空/泵系统：监测真空泵电流，保护设备和判断工作状态

• 液体/气体供给系统：用于泵、阀门驱动电流监控，辅助工艺安全运行

• 工艺监测与保护：提供实时电流数据给主控系统，用于报警、停机或优化控制

四、产品优势

1. 实时监测：快速、精确的电流检测，提高工艺设备运行安全性

2. 保护功能完善：可检测异常电流，防止设备过载或损坏

3. 模块化设计：便于替换与维护，缩短停机时间

4. 高可靠性：工业级器件和PCB设计，适应半导体工艺环境

5. 兼容性强：与 AMAT 各类机台电源和控制模块配套，便于集成

AMAT Applied Materials 0100-00046电流感应组件 英文介绍

1、 Product Overview

AMAT Applied Materials 0100-00046 current sensing component is a key module used in semiconductor process equipment power supply and control systems, for real-time monitoring of current signals and feedback to control units. This component can detect the current status of RF power supply, vacuum pump, actuator or other critical subsystems, thereby achieving closed-loop control, fault protection and process parameter monitoring.

2、 Technical parameters (speculated and organized)

Functional positioning: Current detection and signal feedback

Measurement range: can cover typical power current in the equipment (specific values vary depending on the model)

Output signal: Analog voltage signal or digital signal feedback to the main control system

Interface form: onboard interface or connection harness output to controller

Protection function: equipped with overcurrent and short circuit detection functions to ensure equipment safety

Installation method: Modular design, can be installed near the chassis, control chassis or power module

Environmental adaptability: Industrial grade design, suitable for high temperature, clean room, and electromagnetic interference environments of semiconductor equipment

Version revision: There may be different versions (such as Rev A/B) with slight differences in measurement accuracy or interface methods

3、 Application scenarios

RF power monitoring: detecting RF matching devices, power output, or load current to achieve closed-loop regulation

Vacuum/pump system: monitoring vacuum pump current, protecting equipment, and determining working status

Liquid/gas supply system: used for monitoring the driving current of pumps and valves, and assisting in the safe operation of processes

Process monitoring and protection: Provide real-time current data to the main control system for alarm, shutdown, or optimized control

4、 Product advantages

Real time monitoring: fast and accurate current detection to improve the safety of process equipment operation

Complete protection function: can detect abnormal current, prevent equipment overload or damage

Modular design: easy to replace and maintain, reducing downtime

High reliability: Industrial grade devices and PCB design, suitable for semiconductor process environments

Strong compatibility: compatible with various AMAT machine power and control modules, easy to integrate

AMAT Applied Materials 0100-00046电流感应组件 产品展示      

3.其他产品

TRICONEX 3351分析输入模块
TRICONEX 3301 数字输入模块
TRICONEX 3201数字输入单元

4.其他英文产品

07KT97 GJR5253000R4270 module

07KT98 GJR5253100R4278 Logic module
07KT98 H3 GJR5253100R0278 Logic module

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：AMAT Applied Materials

型号：0100-00046电流感应组件

质保：一年

成色：全新/二手

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