AMAT Applied Materials 0010-09198安瓿组装 PDF资料 

1.产 品 资 料 介 绍：

一、产品概述

AMAT Applied Materials 0010-09198 安瓿组装（Ampoule Assembly）是一种用于半导体制造设备的专用组件，主要承担工艺过程中特殊气体、化学品或试剂的密封存储、输送与释放功能。其设计旨在保证物料在洁净、可控的环境下安全转移，同时避免污染和泄漏。

二、技术参数

• 部件类型：安瓿组件（Ampoule Assembly）

• 主要功能：化学气体或液体的存储与受控释放

• 典型材质：高纯度玻璃、不锈钢合金及耐腐蚀密封件

• 密封方式：真空密封/焊接密封

• 安装方式：可直接与 AMAT 工艺腔室或输送管路对接

• 兼容性：支持多种 AMAT 工艺平台（如 PVD、CVD、ALD 等）

三、应用场景

• 半导体制造：用于关键工艺中的前驱体气体或液体的安全供应

• 真空工艺系统：在高真空环境下为工艺提供纯净的化学源

• 研发实验：适合少量特殊化学试剂的高效利用

• 耗材更换：作为可更换模块，方便快速安装与拆卸

四、产品优势

1. 高纯度保障：避免颗粒、杂质或外界污染物进入工艺腔室。

2. 安全性高：防止有害化学物泄漏，保障人员与环境安全。

3. 密封可靠：长期存储与使用过程中保持气密性。

4. 模块化设计：支持快速更换，缩短设备停机时间。

5. 适应多工艺：满足不同气体/液体源在 PVD、CVD、ALD 等工艺中的应用

AMAT Applied Materials 0010-09198安瓿组装 英文介绍

1、 Product Overview

AMAT Applied Materials 0010-09198 Ampoule Assembly is a specialized component used in semiconductor manufacturing equipment, mainly responsible for the sealed storage, transportation, and release of special gases, chemicals, or reagents during the process. Its design aims to ensure the safe transfer of materials in a clean and controllable environment, while avoiding pollution and leakage.

2、 Technical parameters

Component type: Ampoule Assembly

Main function: Storage and controlled release of chemical gases or liquids

Typical materials: high-purity glass, stainless steel alloy, and corrosion-resistant seals

Sealing method: vacuum sealing/welding sealing

Installation method: Can be directly connected to AMAT process chamber or conveying pipeline

Compatibility: Supports multiple AMAT process platforms (such as PVD, CVD, ALD, etc.)

3、 Application scenarios

Semiconductor manufacturing: safe supply of precursor gases or liquids used in critical processes

Vacuum process system: providing pure chemical sources for processes in high vacuum environments

Research and development experiment: suitable for efficient utilization of a small amount of special chemical reagents

Consumable replacement: As a replaceable module, it is convenient and quick to install and disassemble

4、 Product advantages

High purity guarantee: Avoid particles, impurities, or external contaminants from entering the process chamber.

High safety: prevent the leakage of harmful chemicals and ensure the safety of personnel and the environment.

Reliable sealing: Maintain airtightness during long-term storage and use.

Modular design: supports quick replacement and reduces equipment downtime.

Adapt to multiple processes: meet the application of different gas/liquid sources in PVD, CVD, ALD and other processes

AMAT Applied Materials 0010-09198安瓿组装  产品展示      

3.其他产品

TRICONEX 3401 Digital Output Module
TRICONEX 3351分析输入模块
TRICONEX 3301 数字输入模块

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07KT97 GJR5253000R4270 module

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品牌：AMAT Applied Materials

型号：0010-09198安瓿组装

质保：一年

成色：全新/二手

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